|Publication number||US6495437 B1|
|Application number||US 09/781,039|
|Publication date||Dec 17, 2002|
|Filing date||Feb 9, 2001|
|Priority date||Feb 9, 2001|
|Publication number||09781039, 781039, US 6495437 B1, US 6495437B1, US-B1-6495437, US6495437 B1, US6495437B1|
|Original Assignee||Advanced Micro Devices, Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (68), Non-Patent Citations (16), Referenced by (84), Classifications (15), Legal Events (6)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This patent application is related to U.S. Pat. No. 6,100,120 issued to Yu on Aug. 8, 2000. This patent application is also related to U.S. patent application Ser. No. 09/779,987 (Attorney Docket No. 39153-412), filed on an even date herewith by Yu, entitled “A Process For Manufacturing MOS Transistors Having Elevated Source and Drain Regions and a Gate,” U.S. patent application Ser. No. 09/779,985 (Attorney Docket No. 39153-407), filed on an even date herewith by Yu, entitled “Replacement Gate Process for Transistor Having Elevated Source and Drain,” U.S. patent application Ser. No. 09/780,043 (Attorney Docket No. 39153-414), filed on an even date herewith by Yu, entitled “Fully Depleted SOI or with Elevated Source and Drain,” U.S. patent application Ser. No. 09/779,988 (Attorney Docket No. 39153-417), filed on an even date herewith by Yu, entitled “Low Temperature Process for MOSFET with Elevated Source and Drain,” and U.S. patent application Ser. No. 09/779,986 (Attorney Docket No. 39153-413), filed on an even date herewith by Yu, entitled “A Low Temperature Process For A Thin Film Fully Depleted SOI MOSFET.” All of the above patent applications are assigned to the assignee of the present application.
The present specification relates to integrated circuits (ICs) and methods of manufacturing integrated circuits. More particularly, the present specification relates to a method of manufacturing integrated circuits having transistors with high-k gate dielectrics.
Currently, deep-submicron complementary metal oxide semiconductor (CMOS) is the primary technology for ultra-large scale integrated (ULSI) devices. Over the last two decades, reducing the size of CMOS transistors and increasing transistor density on ICs has been a principal focus of the microelectronics industry. An ultra-large scale integrated circuit (ULSI) can include over 1 million transistors.
The ULSI circuit can include CMOS field effect transistors (FETS) which have semiconductor gates disposed between drain and source regions. The drain and source regions are typically heavily doped with a P-type dopant (boron) or an N-type dopant (phosphorous).
The drain and source regions generally include a thin extension (shallow source and drain extensions) that is disposed partially underneath the gate to enhance the transistor performance. Shallow source and drain extensions help to achieve immunity to short-channel effects which degrade transistor performance for both N-channel and P-channel transistors. Short-channel effects can cause threshold voltage roll-off and drain-induced barrier-lowering. Shallow source and drain extensions and, hence, controlling short-channel effects, are particularly important as transistors become smaller.
Conventional techniques utilize a double implant process to form shallow source and drain extensions. According to a conventional process, the source and drain extensions are formed by providing a transistor gate structure without sidewall spacers on a top surface of a silicon substrate. The silicon substrate is doped on both sides of the gate structure via a conventional doping process, such as, a diffusion process or an ion implantation process. Without the sidewall spacers, the doping process introduces dopants into a thin region just below the top surface of the substrate to form the drain and source extensions as well as to partially form the drain and source regions.
After the drain and source extensions are formed, silicon dioxide spacers, which abut lateral sides of the gate structure, are provided over the source and drain extensions. With the silicon dioxide spacers in place, the substrate is doped a second time to form deep source and drain regions. During formation of the deep source and drain regions, further doping of the source and drain extensions is inhibited due to the blocking capability of the silicon dioxide spacers. After doping, the source and drain regions are annealed in a high temperature process to activate the dopants in the source and drain regions.
High temperature processes over 750 to 800° C. can cause dielectric materials with a high dielectric constant (k) to react with the substrate (e.g., silicon). High-k (k>20) gate dielectrics are desirable as critical transistor dimensions continue to decrease. The reduction of critical transistor dimensions requires that the thickness of the gate oxide also be reduced. A major drawback to the decreased gate oxide thickness (e.g., <30 Å) is that direct tunneling gate leakage current increases as gate oxide thickness decreases. To suppress gate leakage current, material with a high dielectric constant (k) can be used as a gate dielectric instead of the conventional gate oxides, such as thermally grown silicon dioxide.
High-k gate dielectric materials have advantages over conventional gate oxides. A high-k gate dielectric material with the same effective electrical thickness (same capacitive effect) as a thermal oxide is much thicker physically than the conventional oxide. Being thicker physically, the high-k dielectric gate insulator is less susceptible to direct tunnel leakage current. Tunnel leakage current is exponentially proportional to the gate dielectric thickness. Thus, using a high-k dielectric gate insulator significantly reduces the direct tunneling current flow through the gate insulator.
High-k dielectric materials include, for example, aluminum oxide (Al2O3), titanium oxide (Ti2O3), silicon nitride (Si3N4) and tantalum pentaoxide (TaO5). Aluminum oxide has a dielectric constant (k) equal to eight (8) and is relatively easy to make as a gate insulator for a very small transistor. Small transistors often have a physical gate length of less than 80 nm.
Silicidation processes can adversely affect high-k gate dielectric materials of the gate stack. Silicidation processes often utilize high temperature deposition on low temperature deposition combined with a heating step. For example, silicidation processes, such as, cobalt silicidation processes, often require temperatures of 800-825° C. which can cause the high-k gate dielectric material to react with the substrate or the gate conductor.
Thus, there is a need for transistors manufactured in an optimized silicidation process. Yet further, there is a need for a transistor with elevated source and drain regions and a high-k gate dielectric. Yet even further, there is a need for a process of forming a transistor with silicided source and drain regions and a high-k gate dielectric. Further, there is a need for a process flow which forms high-k gate dielectric films after silicidation of drain and source regions. Even further, there is a need for a process that utilizes a high temperature (greater than 750° C.) silicidation technique and a high-k gate dielectric layer. Even further still, there is a need for a method of forming a high-k gate dielectric layer after source and drain silicidation.
An exemplary embodiment relates to a method of forming a dielectric insulator for a transistor. The method includes providing a sacrificial gate structure on a substrate, forming source/drain regions, siliciding the source/drain regions, removing the sacrificial gate material, and transforming metal material into a high-k gate dielectric material for the dielectric insulator. The gate structure includes the layer of metal material above the substrate. The gate structure also includes the sacrificial gate material above the metal material.
Another exemplary embodiment relates to a method of manufacturing integrated circuit. The method includes providing a gate structure, providing a silicide layer next to at least one side of the gate structure, removing a sacrificial layer in the gate structure, and forming a dielectric gate insulator. The dielectric gate insulator is formed from a metal layer associated with the gate structure.
Yet another exemplary embodiment relates to a method of forming a gate structure. The gate structure includes a high-k dielectric layer. The method includes the following steps in the following order: depositing a metal layer above a substrate, depositing a sacrificial layer above the metal layer, etching the sacrificial layer and the metal layer, siliciding the substrate, removing the sacrificial layer, and forming the high-k dielectric layer using the metal layer. The etching of the sacrificial and the metal layer defines the gate structure. The sacrificial layer is removed from the gate structure. The high-k gate dielectric layer is formed within the gate structure.
Exemplary embodiments will hereafter be described with reference to the accompanying drawings, wherein like numerals denote like elements, and:
FIG. 1 is a cross-sectional view of a portion of an integrated circuit in accordance with an exemplary embodiment of the present invention, the integrated circuit including a transistor with silicided source/drain regions and a gate dielectric;
FIG. 2 is a cross-sectional view of the portion of the integrated circuit illustrated in FIG. 1, showing a gate stack formation step and a shallow source/drain extension dopant implant step;
FIG. 3 is a cross-sectional view of the portion of the integrated circuit illustrated in FIG. 2, showing a spacer structure formation step and a deep source/drain dopant implant step;
FIG. 4 is a cross-sectional view of the portion of the integrated circuit illustrated in FIG. 3, showing a silicidation step;
FIG. 5 is a cross-sectional view of the portion of the integrated circuit illustrated in FIG. 4, showing an insulative layer deposition step;
FIG. 6 is a cross-sectional view of the portion of the integrated circuit illustrated in FIG. 1, showing a chemical mechanical polish (CMP) step;
FIG. 7 is a cross-sectional view of the portion of the integrated circuit illustrated in FIG. 1, showing a sacrificial gate conductor removal step and a gate dielectric formation step; and
FIG. 8 is a cross sectional view of the portion of the integrated circuit illustrated in FIG. 1, showing a gate conductor refill step.
With reference to FIG. 1, a portion 10 of an integrated circuit (IC) includes a transistor 12 which is disposed on a semiconductor substrate 14, such as, a wafer. Semiconductor substrate 14 is preferably a bulk P-type silicon substrate. Alternatively, substrate 14 can be any type of IC substrate including a gallium arsenide (GaAs), germanium, or a semiconductor-on-insulator (SOI) substrate (e.g., a silicon-on-glass substrate).
Transistor 12 can be a P-channel or N-channel metal oxide semiconductor field effect transistor (MOSFET) and is described below as an N-channel transistor. Transistor 12 includes a gate structure 18, a source region 22, and a drain region 24. Alternatively, regions 22 and 24 can be embodied as elevated sources/drain regions.
Regions 22 and 24 extend from a top surface 27 of substrate 14 to a bottom 55 in substrate 14. Regions 22 and 24 are 500-1500 Å deep (from surface 27 to bottom 55) and include a source extension 23, a drain extension 25, a deep source region 33, and a deep drain region 35. For an N-channel transistor, regions 22 and 24 are heavily doped with N-type dopants (e.g., 5×1019−1×1020 dopants per cubic centimeter). For a P-channel transistor, regions 22 and 24 are heavily doped with P-type dopants (5×1019−1×1020 dopants per cubic centimeter).
Extensions 23 and 25 are preferably ultra-shallow extensions (e.g., junction depth is less than 20 nanometers (nm), 100-250 Å), which are thinner than regions 33 and 35. Extensions 23 and 25 are connected to regions 33 and 35, respectively, and are disposed partially underneath gate structure 18. Regions 33 and 35 are preferably more than 100 Å thick (e.g. 500 to 1500 Å) from surface 27 to bottom 55. A channel region 41 underneath gate structure 18 separates extensions 23 and 25.
Ultra-shallow extensions 23 and 25 help transistor 12 achieve substantial immunity to short-channel effects. Short-channel effects can degrade the performance of transistor 12 as well as the manufacturability of the IC associated with transistor 12. Regions 33 and 35 and extensions 23 and 25 have a concentration of 1019 to 1020 dopants per cubic centimeter. An appropriate dopant for a P-channel transistor is boron, boron diflouride, or iridium, and an appropriate dopant for an N-type transistor is arsenic, phosphorous, or antimony.
Gate stack or structure 18 includes a gate dielectric layer 34 and a gate conductor 36. Structure 18 can be 500-2000 Å thick (height) and 30-200 Å wide. Dielectric layer 34 can be comprised of a high-k dielectric material. Layer 34 is preferably a 2-40 nm thick conformal layer of tantalum pentaoxide (Ta2O5), aluminum oxide (Al2O3), titanium dioxide (Ti2O), or other material having a dielectric constant (k) over 20. In one preferred embodiment, layer 34 is a 1-2 nm thick layer of aluminum oxide having a dielectric constant of 8 or more.
Gate conductor 36 is disposed above dielectric layer 34. Gate conductor 36 is preferably 500-2000 Å thick. Conductor 36 can be a metal, such as titanium nitride (TiN), tungsten (W), Molybdenum (Mo), Aluminum (Al), or composites and alloys thereof. Alternatively, conductor 36 can be polysilicon or polysilicon/germanium. In one preferred embodiment, conductor 36 is 1500 Å thick layer of polysilicon.
Gate structure 18 is disposed over channel region 41. Gate structure 18 can also include oxide liners or spacers 62. Spacers 62 abut sidewalls of gate conductor 36. Spacers 62 are preferably silicon dioxide (SiO2). Alternatively, spacers 62 can be a low-k dielectric material, or silicon nitride (Si3N4) material, or other insulator. Preferably, spacers 62 have a width of 300-800 Å and a thickness (height) of 500-2000 Å.
A silicide layer 56 is disposed on top of source region 22 and drain region 24. Preferably, layer 56 is a cobalt silicide (CoSix) material. Alternatively, layer 56 can be any type of refractory metal and silicon combination, such as, a nickel silicide, tungsten silicide, or other silicide material. Preferably, layer 56 is 150-400 Å thick.
Conductive contacts 68 can be coupled to layer 56 through an insulating layer 48 (e.g., interlevel dielectric layer Ø) to connect regions 22 and 24 to conductive lines 70. Layer 48 can be 500-2000 Å thick silicon dioxide layer.
Contacts 68 can be a metal material or composite metal material, such as a contact including tungsten. Conductive lines 70 can be aluminum or any conventional interconnect material (e.g., metal layer 1).
Transistor 12 can be an N-channel or a P-channel field effect transistor, such as, a metal oxide semiconductor field effect transistor (MOSFET). Transistor 12 is at least partially covered by insulative layer 48 and is preferably part of an ultra-large scale integrated (ULSI) circuit that includes one million or more transistors.
With reference to FIGS. 1-8, the fabrication of transistor 12, including gate dielectric layer 34 and silicide layer 56 above source region 22 and drain region 24, is described as follows. The advantageous process allows silicide layer 56 above source and drain regions 33 and 35 to be formed with appropriate dopant activation without adversely affecting dielectric layer 34. The process forms regions 22 and 24 and layer 56 before layer 34, thereby reducing the thermal budget for steps subsequent the formation of layer 34 (achieving lower post-gate fabrication process temperatures).
With reference to FIG. 2, portion 10 includes a sacrificial gate stack or gate structure 19 including a sacrificial gate conductor 37 and a layer 35. Preferably, layer 35 is deposited or formed on top of surface 27 of substrate 14 and sacrificial conductor 37 is deposited or formed over layer 35.
Conductor 37 and layer 35 are selectively etched to leave gate structure 19 on a top surface 27 of substrate 14. Preferably, conductor 37 is 500 to 2000 Å thick above a 10 Å to 50 Å thick layer 35. Conductor 37 can be deposited by chemical vapor deposition (CVD).
Sacrificial gate conductor 37 (e.g., dummy gate) can be a silicon nitride material. Layer 35 is preferably a metal material. For example, layer 35 can be a tantalum, titanium, or aluminum layer. Preferably, layer 35 is a 10-20 Å thick layer of aluminum deposited by CVD. Conductor 37 is a sacrificial material and can be any type of material, including insulative or semiconductive materials. Preferably, material for conductor 37 is chosen to have different etch characteristics than layer 35 and spacers 62 (FIG. 1).
After gate structure 19 is formed, substrate 14 is subjected to a dopant implant (a shallow source drain extension dopant implant). Preferably, N-type or P-type dopants are provided by ion implantation to a depth of 100-250 Å below surface 27 of substrate 14. The dopants can be implanted in a conventional ion implantation technique (e.g., as ions at 500-1000 keV at a dose of 2×1014−1×1015 dopants per square centimeter). Ion implantation can be performed by implantation devices manufactured by companies, such as, Verion Company of Palo Alto, Calif., Genius Company, and Applied Materials, Inc. The source drain extension dopant implant is for the formation of extensions 23 and 25 (FIG. 1) in substrate 14. Alternatively, other doping techniques can be utilized to for extensions 23 and 25.
In FIG. 3, portion 10 is subjected to a spacer formation process which creates spacers 62 on sidewalls 90 of gate structure 19. Preferably, spacers 62 are an oxide material and are formed in a conventional CVD and etch-back process. Spacers 62 can be silicon dioxide (SiO2) spacers formed in a tetraethylorthosilicate (TEOS) CVD and dry etch-back process.
After spacers 62 are formed, substrate 14 is subject to a dopant implant (a deep source/drain dopant implant). Preferably, N-type or P-type dopants are provided by ion implantation to a depth of 500-1500 Å below surface 27. Dopants can be implanted according to a technique similar to the technique utilized for the shallow source/drain extension dopant implant discussed with reference to FIG. 2.
Dopants can be implanted in a conventional implantation technique (e.g., as ions at 10-100 keV at a dose of 1×1015−5×1015 dopants per square centimeter). The deep source drain implant is for the formation of deep source region 33 and deep drain region 35 (FIG. 1) in substrate 14. Alternatively, other doping techniques can be utilized for regions 33 and 35.
After implantation, substrate 14 is subject to a thermal annealing process. The thermal annealing process activates dopants within regions 22 and 24. The thermal annealing process can be performed at a temperature of 850-900 degrees C. Various annealing techniques can be utilized including laser annealing, rapid thermal annealing (RTA) or other techniques for activating dopants in regions 22 and 24. High temperatures can be utilized to activate dopants in regions 22 and 24 because layer 34 embodied as a high-gate dielectric layer has not yet been formed.
In FIG. 4, layer 56 is formed above regions 22 and 24. Layer 56 can be formed in a self-aligned silicidation process. The process is preferably a cobalt silicide process having an anneal temperature of 800-825 degrees Celsius.
According to one embodiment, a cobalt layer is deposited over regions 22 and 24. After deposition, the cobalt layer is heated to react with substrate 14 and form layer 56. Layer 56 is preferably 150-400 Å thick and consumes 30% percent of its thickness from substrate 14. High temperature processes can be utilized for layer 56 because gate dielectric layer 34 has not yet been formed. Alternatively, layer 56 can be a titanium silicide, nickel silicide, tungsten silicide, or other material.
In FIG. 5, after layer 56 is formed, layer 56 and gate structure 19 are covered in insulative layer 48. Insulative layer 48 can be a 2000-5000 Å thick oxide layer (e.g., SiO2) deposited in a tetraethylorthosilicate process (TEOS). Layer 48 can serve as at least part of an interlevel dielectric layer. Alternatively, other insulative layers or compositions can be utilized for layer 48.
In FIG. 6, after layer 48 is provided over substrate 14, layer 48 is subject to a planarization process, such as, a chemical mechanical polish (CMP). The CMP step removes layer 48 to expose sacrificial gate conductor 37 in structure 19. Preferably, layer 48 has a top surface 63 co-planar with a top surface 65 of gate conductor 37.
In FIG. 7, gate conductor 37 is removed to form an aperture 78. Aperture 78 is preferably 300-2000 Å wide. Preferably, a wet chemical etch is utilized to remove sacrificial gate conductor 37. The wet chemical etch can be selective to silicon nitride if conductor 37 is a silicon nitride material. In a preferred embodiment, the wet chemical etch is not selective to the oxide material associated with spacer 62 or the metal material associated with layer 34. The wet chemical etch can be a H3PO4 acid process. Alternatively, plasma dry etching or other techniques can be utilized to remove gate conductor 37 depending upon process parameters and materials.
After sacrificial gate conductor 37 is removed and a top surface 71 (FIG. 6) of layer 35 is exposed, layer 35 is transformed into dielectric layer 34. Preferably, layer 35 is transformed into a high-k gate (k greater than 8) dielectric layer. Layer 35 can be transformed into a metal oxide material having a high-k dielectric constant. For example, if layer 35 is aluminum, layer 34 can be a high-k aluminum oxide (Al2O3) film. Layer 35 can be transformed in a low temperature (200-300° C. thermal process). Local thermal oxidation of layer 35 can create layer 34. Although low temperatures are preferred, temperature requirements can vary depending upon the type of material utilized for layer 35.
In the preferred embodiment, layer 35 is aluminum and is oxidized at a temperature between 250-300° C. Preferably, layer 34 is grown to a thickness of 10-°Å and is 300-2000 Å wide. Layer 34 is formed within aperture 78 associated with the removal of conductor 35. Dielectric layer 34 can be slightly wider (less than 5 percent wider than aperture 78). The above process provides a substantial uniform thickness for layer 34. In addition, difficulties associated with etching high-k gate dielectric layers are removed because layer 35 is etched before being transformed into layer 34.
According to an alternate embodiment, layer 35 can be removed by an etching process and layer 34 can be formed in a deposition or sputtering process. However, sputtering and deposition may have undesirable non-uniform thicknesses.
In FIG. 8, after layer 34 is formed, aperture 78 is filled with gate conductor 36. Preferably, gate conductor 36 is a metal material, such as a titanium nitride, tungsten, molybdenum, or other conductor. A conformal layer of the material for gate conductor 36 can be deposited over layer 48 and within aperture 78. The layer is ansotropically etched to leave conductor 36 in aperture 78. Alternatively, any deposition and polish process can be utilized to refill aperture 78 with conductor 36.
In FIG. 1, after conductor 36 is provided, an additional insulative layer can be provided to increase the height of insulative layer 48. After the insulative layer 48 is completed, a planarization process can be performed on layer 48 and vias for contacts 68 can be etched. Contacts 68 can be provided to connect to layers 56 conductive lines 70. Lines 70 can be formed above layer 48 and be connected to contact 68. Conventional integrated circuit fabrication processes can be utilized to provide various other connections and form other devices necessary for portion 10 of the integrated circuit.
It is understood that while the detailed drawings, specific examples, material types, thicknesses, dimensions, and particular values given provide a preferred exemplary embodiment of the present invention, the preferred exemplary embodiment is for the purpose of illustration only. The method and apparatus of the invention is not limited to the precise details and conditions disclosed. For example, although specific types of structures are shown, other structures can be utilized. Various changes may be made to the details disclosed without departing from the scope of the invention which is defined by the following claims.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US4532695||Jul 2, 1982||Aug 6, 1985||The United States Of America As Represented By The Secretary Of The Air Force||Method of making self-aligned IGFET|
|US4683645||Dec 24, 1985||Aug 4, 1987||Northern Telecom Limited||Process of fabricating MOS devices having shallow source and drain junctions|
|US4745082||Jun 12, 1986||May 17, 1988||Ford Microelectronics, Inc.||Method of making a self-aligned MESFET using a substitutional gate with side walls|
|US4784718||Feb 19, 1987||Nov 15, 1988||Kabushiki Kaisha Toshiba||Method for manufacturing semiconductor device|
|US4789644||Dec 22, 1986||Dec 6, 1988||Sgs Microelettronica Spa||Process for fabrication, by means of epitaxial recrystallization, of insulated-gate field-effect transistors with junctions of minimum depth|
|US4835112||Mar 8, 1988||May 30, 1989||Motorola, Inc.||CMOS salicide process using germanium implantation|
|US4954867||Jun 1, 1988||Sep 4, 1990||Seiko Instruments Inc.||Semiconductor device with silicon oxynitride over refractory metal gate electrode in LDD structure|
|US4998150||Dec 22, 1988||Mar 5, 1991||Texas Instruments Incorporated||Raised source/drain transistor|
|US5102816||Mar 26, 1991||Apr 7, 1992||Sematech, Inc.||Staircase sidewall spacer for improved source/drain architecture|
|US5108954||Sep 23, 1991||Apr 28, 1992||Micron Technology, Inc.||Method of reducing contact resistance at silicide/active area interfaces and semiconductor devices produced according to the method|
|US5258637||Mar 11, 1992||Nov 2, 1993||Micron Technology, Inc.||Semiconductor devices produced according to a method which reduces contact resistance at silicide/active area interfaces|
|US5264382||Mar 18, 1991||Nov 23, 1993||Fujitsu Limited||Method of producing semiconductor device using dummy gate structure|
|US5374575||Nov 23, 1993||Dec 20, 1994||Goldstar Electron Co., Ltd.||Method for fabricating MOS transistor|
|US5391510||Apr 7, 1994||Feb 21, 1995||International Business Machines Corporation||Formation of self-aligned metal gate FETs using a benignant removable gate material during high temperature steps|
|US5393685||Aug 10, 1992||Feb 28, 1995||Taiwan Semiconductor Manufacturing Company||Peeling free metal silicide films using rapid thermal anneal|
|US5429956||Sep 30, 1994||Jul 4, 1995||United Microelectronics Corporation||Method for fabricating a field effect transistor with a self-aligned anti-punchthrough implant channel|
|US5491099||Aug 29, 1994||Feb 13, 1996||United Microelectronics Corporation||Method of making silicided LDD with recess in semiconductor substrate|
|US5516707||Jun 12, 1995||May 14, 1996||Vlsi Technology, Inc.||Large-tilted-angle nitrogen implant into dielectric regions overlaying source/drain regions of a transistor|
|US5593907||Mar 8, 1995||Jan 14, 1997||Advanced Micro Devices||Large tilt angle boron implant methodology for reducing subthreshold current in NMOS integrated circuit devices|
|US5595919||Feb 20, 1996||Jan 21, 1997||Chartered Semiconductor Manufacturing Pte Ltd.||Method of making self-aligned halo process for reducing junction capacitance|
|US5607884||Feb 2, 1994||Mar 4, 1997||Lg Semicon Co., Ltd.||Method for fabricating MOS transistor having source/drain region of shallow junction and silicide film|
|US5654570||Apr 19, 1995||Aug 5, 1997||International Business Machines Corporation||CMOS gate stack|
|US5675159||Jan 5, 1996||Oct 7, 1997||Mitsubishi Denki Kabushiki Kaisha||Recessed gate field effect transistor|
|US5716861||Jun 7, 1995||Feb 10, 1998||Texas Instruments Incorporated||Insulated-gate field-effect transistor structure and method|
|US5736446||May 21, 1997||Apr 7, 1998||Powerchip Semiconductor Corp.||Method of fabricating a MOS device having a gate-side air-gap structure|
|US5753542||Mar 1, 1995||May 19, 1998||Semiconductor Energy Laboratory Co., Ltd.||Method for crystallizing semiconductor material without exposing it to air|
|US5793090||Jan 10, 1997||Aug 11, 1998||Advanced Micro Devices, Inc.||Integrated circuit having multiple LDD and/or source/drain implant steps to enhance circuit performance|
|US5811323||Sep 27, 1996||Sep 22, 1998||Seiko Epson Corporation||Process for fabricating a thin film transistor|
|US5825066||Nov 26, 1997||Oct 20, 1998||Advanced Micro Devices, Inc.||Control of juction depth and channel length using generated interstitial gradients to oppose dopant diffusion|
|US5851869||Sep 24, 1996||Dec 22, 1998||Fujitsu Limited||Manufacture of semiconductor device having low contact resistance|
|US5856225||Nov 24, 1997||Jan 5, 1999||Chartered Semiconductor Manufacturing Ltd||Creation of a self-aligned, ion implanted channel region, after source and drain formation|
|US5858843||Sep 27, 1996||Jan 12, 1999||Intel Corporation||Low temperature method of forming gate electrode and gate dielectric|
|US5888888||Jan 29, 1997||Mar 30, 1999||Ultratech Stepper, Inc.||Method for forming a silicide region on a silicon body|
|US5908307||Jan 31, 1997||Jun 1, 1999||Ultratech Stepper, Inc.||Fabrication method for reduced-dimension FET devices|
|US5915182||Oct 17, 1997||Jun 22, 1999||Texas Instruments - Acer Incorporated||MOSFET with self-aligned silicidation and gate-side air-gap structure|
|US5915196||Nov 12, 1996||Jun 22, 1999||Nec Corporation||Method of forming shallow diffusion layers in a semiconductor substrate in the vicinity of a gate electrode|
|US5953616||May 8, 1998||Sep 14, 1999||Lg Semicon Co., Ltd.||Method of fabricating a MOS device with a salicide structure|
|US5960270 *||Aug 11, 1997||Sep 28, 1999||Motorola, Inc.||Method for forming an MOS transistor having a metallic gate electrode that is formed after the formation of self-aligned source and drain regions|
|US5985726||Nov 6, 1998||Nov 16, 1999||Advanced Micro Devices, Inc.||Damascene process for forming ultra-shallow source/drain extensions and pocket in ULSI MOSFET|
|US6008111||Mar 13, 1997||Dec 28, 1999||Fujitsu Limited||Method of manufacturing semiconductor device|
|US6017808||Oct 24, 1997||Jan 25, 2000||Lsi Logic Corporation||Nitrogen implanted polysilicon gate for MOSFET gate oxide hardening|
|US6025254 *||Dec 23, 1997||Feb 15, 2000||Intel Corporation||Low resistance gate electrode layer and method of making same|
|US6030863||Sep 11, 1998||Feb 29, 2000||Taiwan Semiconductor Manufacturing Company||Germanium and arsenic double implanted pre-amorphization process for salicide technology|
|US6037204||Aug 7, 1998||Mar 14, 2000||Taiwan Semiconductor Manufacturing Company||Silicon and arsenic double implanted pre-amorphization process for salicide technology|
|US6051473||Nov 22, 1996||Apr 18, 2000||Advanced Micro Devices, Inc.||Fabrication of raised source-drain transistor devices|
|US6072222||May 18, 1998||Jun 6, 2000||Advanced Micro Devices, Inc.||Silicon implantation into selective areas of a refractory metal to reduce consumption of silicon-based junctions during salicide formation|
|US6080645||Oct 29, 1996||Jun 27, 2000||Micron Technology, Inc.||Method of making a doped silicon diffusion barrier region|
|US6087235||Oct 14, 1999||Jul 11, 2000||Advanced Micro Devices, Inc.||Method for effective fabrication of a field effect transistor with elevated drain and source contact structures|
|US6096614||Feb 6, 1998||Aug 1, 2000||Texas Instruments - Acer Incorporated||Method to fabricate deep sub-μm CMOSFETS|
|US6100787||May 28, 1997||Aug 8, 2000||Motorola, Inc.||Multilayer ceramic package with low-variance embedded resistors|
|US6103609||Oct 29, 1998||Aug 15, 2000||Lg Semicon Co., Ltd.||Method for fabricating semiconductor device|
|US6110783||Jun 27, 1997||Aug 29, 2000||Sun Microsystems, Inc.||Method for forming a notched gate oxide asymmetric MOS device|
|US6137149||Jun 27, 1997||Oct 24, 2000||Nec Corporation||Semiconductor device having raised source-drains and method of fabricating the same|
|US6150221||Feb 20, 1998||Nov 21, 2000||Nec Corporation||Semiconductor device and method for manufacturing same|
|US6156613||May 7, 1999||Dec 5, 2000||Texas Instruments - Acer Incorporated||Method to form MOSFET with an elevated source/drain|
|US6184097||Feb 22, 1999||Feb 6, 2001||Advanced Micro Devices, Inc.||Process for forming ultra-shallow source/drain extensions|
|US6187642||Jun 15, 1999||Feb 13, 2001||Advanced Micro Devices Inc.||Method and apparatus for making mosfet's with elevated source/drain extensions|
|US6190977||Nov 15, 1999||Feb 20, 2001||Texas Instruments - Acer Incorporated||Method for forming MOSFET with an elevated source/drain|
|US6200867||Nov 17, 1998||Mar 13, 2001||Winbond Electronics Corporation||Method for forming raised source and drain|
|US6228722 *||Apr 16, 1999||May 8, 2001||United Microelectronics Corp.||Method for fabricating self-aligned metal silcide|
|US6300201 *||Mar 13, 2000||Oct 9, 2001||Chartered Semiconductor Manufacturing Ltd.||Method to form a high K dielectric gate insulator layer, a metal gate structure, and self-aligned channel regions, post source/drain formation|
|US6300203 *||Oct 5, 2000||Oct 9, 2001||Advanced Micro Devices, Inc.||Electrolytic deposition of dielectric precursor materials for use in in-laid gate MOS transistors|
|JPH0817845A||Title not available|
|JPH03248433A||Title not available|
|JPH04123439A||Title not available|
|JPH05160396A||Title not available|
|JPH05206454A||Title not available|
|JPH11102907A||Title not available|
|1||"CMOS Metal Replacement Gate Transistors Using Tantalum Pentoxide Gate Insulator", Chatterjee, et al. IEDM, 1998.|
|2||"Recrystallization of Implanted Amorphous Silicon Layers. I. Electrical Properties of Silicon Implanted with BF+2 or Si+ + B+a)" by Tsai, et al. Journal of Applied Physics, vol. 50, No. 1, Jan. 1979.|
|3||"Silicon Processing for the VLSI Era, vol. 1: Process Technology", Wolf, et al., Lattice Press, pp 296-308.|
|4||"Silicon Processing for the VLSI Era, vol. 2: Process Integration" Wolf, et al., Lattice Press, pp 66, 67, 72, 73, 154, 155, 157, 158.|
|5||"Sub 50nm FinFET: PMOS" Huang, et al. Department of Electrical Engineering and Computer Sciences, University of California at Berkley, 1999, IEEE.|
|6||"Sub-100nm Gate Length Metal Gate NMOS Transistors Fabricated by a Replacement Gate Process", Chatterjee, et al., International Electronic Devices Meeting, Dec. 7-10, 1997.|
|7||"Ultra-Thin-Body Silicon-On-Insulator MOSFET's for Terabit-Scale Integration" Yu, et al., Department of Electrical & Computer Sciences.|
|8||U.S. patent application Ser. No. 09/255,546 filed Feb. 22, 1999 "Locally Confined Deep Pocket Process for USLI MOSFETS" (Atty Dkt No. 39153/133).|
|9||U.S. patent application Ser. No. 09/397,217 filed Sep. 16, 1999 "Source/Drain Doping Technique for Ultra-Thin Body SOI MOS" Atty Dkt. No. 39153/203).|
|10||U.S. patent application Ser. No. 09/405,831 filed Sep. 24, 1999 "Process for Manufacturing MOS Transistors Having Elevated Source and Drain" (Atty Dkt. No. 39153/219).|
|11||U.S. patent application Ser. No. 09/609,613 filed Jul. 5, 2000 "Low Thermal Budget Process for Manufacturing MOS Transistors having Elevated Source and Drain Regions" (Atty Dkt No. 39153/269).|
|12||U.S. patent application Ser. No. 09/779,985 filed Feb. 9, 2001 "A Replacement Gate Process for Transistors having Elevated Source and Drain Regions" (Atty Dkt No. 39153/407).|
|13||U.S. patent application Ser. No. 09/779,986 filed Feb. 9, 2001. "A Low Temperature Process for Thin Film Transistor" (Atty Dkt No. 39153/413).|
|14||U.S. patent application Ser. No. 09/779,987 filed Feb. 9, 2001 "A Process for Manufacturing MOS Transistors Having Elevated Source and Drain" (Atty Dkt No. 39153/412).|
|15||U.S. patent application Ser. No. 09/779,988 filed Feb. 9, 2001 "A Low-Temperature Process for a Thin Film Transistor" (Atty Dkt No. 39153/417).|
|16||U.S. patent application Ser. No. 09/780,043 filed Feb. 09, 2001 "Fully Depleted SOI Transistor with Elevated Source and Drain" (Atty Dkt No. 39153/414).|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US6617212 *||Jun 29, 2001||Sep 9, 2003||Hynix Semiconductor Inc.||Semiconductor device and method for fabricating the same using damascene process|
|US6664154 *||Jun 28, 2002||Dec 16, 2003||Advanced Micro Devices, Inc.||Method of using amorphous carbon film as a sacrificial layer in replacement gate integration processes|
|US6746900 *||Feb 19, 2003||Jun 8, 2004||Taiwan Semiconductor Manufacturing Co., Ltd.||Method for forming a semiconductor device having high-K gate dielectric material|
|US6800530 *||Jan 14, 2003||Oct 5, 2004||International Business Machines Corporation||Triple layer hard mask for gate patterning to fabricate scaled CMOS transistors|
|US6909154||Nov 17, 2003||Jun 21, 2005||Intel Corporation||Sacrificial annealing layer for a semiconductor device and a method of fabrication|
|US7098098 *||Aug 23, 2002||Aug 29, 2006||Texas Instruments Incorporated||Methods for transistors formation using selective gate implantation|
|US7112852 *||Apr 23, 2002||Sep 26, 2006||Nec Electronics Corporation||Semiconductor device|
|US7115479 *||Nov 26, 2002||Oct 3, 2006||Intel Corporation||Sacrificial annealing layer for a semiconductor device and a method of fabrication|
|US7138308||Dec 14, 2004||Nov 21, 2006||International Business Machines Corporation||Replacement gate with TERA cap|
|US7176109||Mar 23, 2001||Feb 13, 2007||Micron Technology, Inc.||Method for forming raised structures by controlled selective epitaxial growth of facet using spacer|
|US7196013 *||Dec 12, 2002||Mar 27, 2007||Intel Corporation||Capping layer for a semiconductor device and a method of fabrication|
|US7256450 *||Mar 24, 2004||Aug 14, 2007||Micron Technology, Inc.||NROM memory device with a high-permittivity gate dielectric formed by the low temperature oxidation of metals|
|US7271458 *||Mar 31, 2003||Sep 18, 2007||The Board Of Trustees Of The Leland Stanford Junior University||High-k dielectric for thermodynamically-stable substrate-type materials|
|US7439571 *||May 2, 2005||Oct 21, 2008||Intel Corporation||Method for fabricating metal gate structures|
|US7453755 *||Jul 1, 2005||Nov 18, 2008||Sandisk 3D Llc||Memory cell with high-K antifuse for reverse bias programming|
|US7508648 *||Feb 8, 2005||Mar 24, 2009||Micron Technology, Inc.||Atomic layer deposition of Dy doped HfO2 films as gate dielectrics|
|US7572693||Aug 4, 2006||Aug 11, 2009||Texas Instruments Incorporated||Methods for transistor formation using selective gate implantation|
|US7719065||Aug 29, 2005||May 18, 2010||Micron Technology, Inc.||Ruthenium layer for a dielectric layer containing a lanthanide oxide|
|US7736965||Dec 6, 2007||Jun 15, 2010||International Business Machines Corporation||Method of making a FinFET device structure having dual metal and high-k gates|
|US7833891||Jul 23, 2008||Nov 16, 2010||International Business Machines Corporation||Semiconductor device manufacturing method using oxygen diffusion barrier layer between buried oxide layer and high K dielectric layer|
|US7867919||Dec 8, 2006||Jan 11, 2011||Micron Technology, Inc.||Method of fabricating an apparatus having a lanthanum-metal oxide dielectric layer|
|US7910490||Apr 29, 2009||Mar 22, 2011||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US7915174||Jul 22, 2008||Mar 29, 2011||Micron Technology, Inc.||Dielectric stack containing lanthanum and hafnium|
|US7932521||Apr 26, 2011||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US7945492||Jan 31, 2000||May 17, 2011||Jpmorgan Chase Bank, N.A.||System and method for integrating trading operations including the generation, processing and tracking of and trade documents|
|US7972974||Jan 10, 2006||Jul 5, 2011||Micron Technology, Inc.||Gallium lanthanide oxide films|
|US7989285||Aug 2, 2011||Micron Technology, Inc.||Method of forming a film containing dysprosium oxide and hafnium oxide using atomic layer deposition|
|US8125038||Jul 11, 2005||Feb 28, 2012||Micron Technology, Inc.||Nanolaminates of hafnium oxide and zirconium oxide|
|US8237216||Aug 7, 2012||Micron Technology, Inc.||Apparatus having a lanthanum-metal oxide semiconductor device|
|US8274077||Sep 25, 2012||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US8466463||Nov 17, 2010||Jun 18, 2013||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US8481395||Aug 1, 2011||Jul 9, 2013||Micron Technology, Inc.||Methods of forming a dielectric containing dysprosium doped hafnium oxide|
|US8558325||May 17, 2010||Oct 15, 2013||Micron Technology, Inc.||Ruthenium for a dielectric containing a lanthanide|
|US8617956||Aug 19, 2010||Dec 31, 2013||International Business Machines Corporation||Method and structure for forming high-K/metal gate extremely thin semiconductor on insulator device|
|US8622308||Jan 7, 2009||Jan 7, 2014||Jpmorgan Chase Bank, N.A.||System and method for processing transactions using a multi-account transactions device|
|US8624334 *||Jul 29, 2011||Jan 7, 2014||Infineon Technologies Ag||Strained semiconductor device and method of making the same|
|US8629069||Aug 1, 2008||Jan 14, 2014||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US8637413||Dec 2, 2011||Jan 28, 2014||Sandisk 3D Llc||Nonvolatile resistive memory element with a passivated switching layer|
|US8659001||Sep 1, 2011||Feb 25, 2014||Sandisk 3D Llc||Defect gradient to boost nonvolatile memory performance|
|US8669550||Aug 1, 2008||Mar 11, 2014||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US8686386||Feb 17, 2012||Apr 1, 2014||Sandisk 3D Llc||Nonvolatile memory device using a varistor as a current limiter element|
|US8698119||Jan 19, 2012||Apr 15, 2014||Sandisk 3D Llc||Nonvolatile memory device using a tunnel oxide as a current limiter element|
|US8742515||Jul 3, 2013||Jun 3, 2014||Micron Technology, Inc.||Memory device having a dielectric containing dysprosium doped hafnium oxide|
|US8790959||Jan 21, 2011||Jul 29, 2014||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US8796069||Feb 3, 2010||Aug 5, 2014||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US8802518 *||Oct 17, 2011||Aug 12, 2014||Institute of Microelectronics, Chinese Academy of Sciences||Semiconducor device and method for manufacturing the same|
|US8866121||Feb 17, 2012||Oct 21, 2014||Sandisk 3D Llc||Current-limiting layer and a current-reducing layer in a memory device|
|US8895949||Feb 10, 2014||Nov 25, 2014||Sandisk 3D Llc||Nonvolatile memory device using a varistor as a current limiter element|
|US8901530||Feb 19, 2014||Dec 2, 2014||Sandisk 3D Llc||Nonvolatile memory device using a tunnel oxide as a passive current steering element|
|US8907486||Oct 11, 2013||Dec 9, 2014||Micron Technology, Inc.||Ruthenium for a dielectric containing a lanthanide|
|US8912524||Nov 8, 2013||Dec 16, 2014||Sandisk 3D Llc||Defect gradient to boost nonvolatile memory performance|
|US8946034||Nov 22, 2013||Feb 3, 2015||Infineon Technologies Ag||Strained semiconductor device and method of making the same|
|US9041009||Feb 19, 2013||May 26, 2015||International Business Machines Corporation||Method and structure for forming high-K/metal gate extremely thin semiconductor on insulator device|
|US9058626||Nov 13, 2013||Jun 16, 2015||Jpmorgan Chase Bank, N.A.||System and method for financial services device usage|
|US9099562||Aug 17, 2009||Aug 4, 2015||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US9112031 *||Nov 8, 2013||Aug 18, 2015||International Business Machines Corporation||Reduced resistance finFET device with late spacer self aligned contact|
|US9129961||Jul 1, 2011||Sep 8, 2015||Micron Technology, Inc.||Gallium lathanide oxide films|
|US20020135029 *||Mar 23, 2001||Sep 26, 2002||Er-Xuan Ping||Method for forming raised structures by controlled selective epitaxial growth of facet using spacer|
|US20020153533 *||Apr 23, 2002||Oct 24, 2002||Mototsugu Okushima||Semiconductor device|
|US20030164513 *||Mar 4, 2003||Sep 4, 2003||Micron Technology, Inc.||Method for forming raised structures by controlled selective epitaxial growth of facet using spacer|
|US20030194849 *||Aug 23, 2002||Oct 16, 2003||Johnson F. Scott||Methods for transistors formation using selective gate implantation|
|US20040099904 *||Nov 26, 2002||May 27, 2004||Liu Mark Y.||Sacrificial annealing layer for a semiconductor device and a method of fabrication|
|US20040102057 *||Nov 17, 2003||May 27, 2004||Liu Mark Y.||Sacrificial annealing layer for a semiconductor device and a method of fabrication|
|US20040115935 *||Dec 12, 2002||Jun 17, 2004||Liu Mark Y.||Capping layer for a semiconductor device and a method of fabrication|
|US20040137672 *||Jan 14, 2003||Jul 15, 2004||International Business Machines Corporation||Triple layer hard mask for gate patterning to fabricate scaled cmos transistors|
|US20050139858 *||Dec 29, 2004||Jun 30, 2005||Sung Woong J.||Lateral double-diffused MOS transistor device|
|US20050145893 *||Dec 29, 2003||Jul 7, 2005||Doczy Mark L.||Methods for fabricating metal gate structures|
|US20050191857 *||Dec 15, 2004||Sep 1, 2005||Liu Mark Y.||Capping layer for a semiconductor device and a method of fabrication|
|US20050202644 *||May 2, 2005||Sep 15, 2005||Doczy Mark L.||Method for fabricating metal gate structures|
|US20050212065 *||Mar 24, 2004||Sep 29, 2005||Micron Technology, Inc.||NROM memory device with a high-permittivity gate dielectric formed by the low temperature oxidation of metals|
|US20050272206 *||Aug 9, 2005||Dec 8, 2005||Micron Technology, Inc.||NROM memory device with a high-permittivity gate dielectric formed by the low temperature oxidation of metals|
|US20060128055 *||Dec 14, 2004||Jun 15, 2006||International Business Machines Corporation||Replacement gate with tera cap|
|US20060270139 *||Aug 4, 2006||Nov 30, 2006||Johnson F Scott||Methods for Transistor Formation Using Selective Gate Implantation|
|US20060270140 *||Aug 4, 2006||Nov 30, 2006||Johnson F Scott||Methods for Transistor Formation Using Selective Gate Implantation|
|US20070002603 *||Jul 1, 2005||Jan 4, 2007||Matrix Semiconductor, Inc.||Memory cell with high-K antifuse for reverse bias programming|
|US20070170541 *||Mar 31, 2003||Jul 26, 2007||Chui Chi O||High-k dielectric for thermodynamically-stable substrate-type materials|
|US20090086521 *||Sep 28, 2007||Apr 2, 2009||Herner S Brad||Multiple antifuse memory cells and methods to form, program, and sense the same|
|US20090087974 *||Jun 27, 2008||Apr 2, 2009||Andrew Waite||Method of forming high-k gate electrode structures after transistor fabrication|
|US20090148986 *||Dec 6, 2007||Jun 11, 2009||International Business Machines Corporation||Method of making a finfet device structure having dual metal and high-k gates|
|US20090153762 *||Jan 5, 2009||Jun 18, 2009||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and method for manufacturing the same, and electric device|
|US20100019358 *||Jan 28, 2010||International Business Machines Corporation||Semiconductor device and method of manufacturing|
|US20110278680 *||Nov 17, 2011||Infineon Technologies Ag||Strained Semiconductor Device and Method of Making the Same|
|US20130092986 *||Oct 17, 2011||Apr 18, 2013||Wenwu Wang||Semiconducor device and method for manufacturing the same|
|US20150129988 *||Nov 8, 2013||May 14, 2015||International Business Machines Corporation||Reduced resistance finfet device with late spacer self aligned contact|
|U.S. Classification||438/591, 438/592, 257/E21.444, 438/584|
|International Classification||H01L29/51, H01L21/336, H01L21/28|
|Cooperative Classification||H01L21/28194, H01L29/517, H01L29/66545, H01L21/28238|
|European Classification||H01L29/66M6T6F8, H01L21/28E2C2D, H01L21/28E2C5, H01L29/51M|
|Feb 9, 2001||AS||Assignment|
Owner name: ADVANCED MICRO DEVICES, INC., CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:YU, BIN;REEL/FRAME:011595/0595
Effective date: 20010125
|May 27, 2003||CC||Certificate of correction|
|May 24, 2006||FPAY||Fee payment|
Year of fee payment: 4
|Aug 18, 2009||AS||Assignment|
Owner name: GLOBALFOUNDRIES INC., CAYMAN ISLANDS
Free format text: AFFIRMATION OF PATENT ASSIGNMENT;ASSIGNOR:ADVANCED MICRO DEVICES, INC.;REEL/FRAME:023119/0083
Effective date: 20090630
|May 21, 2010||FPAY||Fee payment|
Year of fee payment: 8
|May 21, 2014||FPAY||Fee payment|
Year of fee payment: 12