|Publication number||US5103277 A|
|Application number||US 07/627,123|
|Publication date||Apr 7, 1992|
|Filing date||Dec 13, 1990|
|Priority date||Sep 11, 1989|
|Publication number||07627123, 627123, US 5103277 A, US 5103277A, US-A-5103277, US5103277 A, US5103277A|
|Inventors||Anthony L. Caviglia, Andras F. Cserhati, John B. McKitterick|
|Original Assignee||Allied-Signal Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (6), Non-Patent Citations (3), Referenced by (46), Classifications (14), Legal Events (4)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application is a continuation-in-part of application Ser. No. 07/405,385, filed Sept. 11, 1989 and now abandoned.
The present invention relates to radiation resistant semiconductor circuits and more particularly to Silicon-on-Insulator (SOI) Complementary Metal Oxide Semiconductor (CMOS) circuits with increased resistance to total dose radiation.
Radiation hard circuits are required for space and military applications. Generally, Silicon-on-Insulator Complementary Metal Oxide Semiconductor (SOI CMOS) devices are insensitive to transient radiation. They are, however, sensitive to total dose radiation effects.
The primary factor limiting the total dose radiation hardness of SOI CMOS devices is the excessive threshold voltage shift that occurs with increased radiation dosage. Ordinarily, the threshold voltages of both PMOS and NMOS devices increase negatively, and at the same rate of change, as the total radiation dose increases. When CMOS devices are incorporated in digital circuits, the effect of such threshold voltage shifts, most often, is that it becomes impossible to turn the circuits "on" or "off" using the normal signal voltages.
One method for increasing the radiation resistance of MOS devices is described in U.S. Pat. No. 4,748,131, issued May 31, 1988, to T. C. Zeitlow, titled "Method for Increasing Radiation Hardness of MOS Gate Oxides". In the method of the '131 patent, fluorine is introduced into the gate oxide by robust procedures which result in a significant reduction of radiation induced interface state density, thereby producing enhanced radiation hardened MOS devices.
U.S. Pat. No. 4,866,498, issued Sept. 12, 1989, to D.R. Myers, titled "Integrated Circuit with Dissipative Layer for Photogenerated Carriers" discloses a CMOS integrated circuit in which the conventional silicon dioxide layer supporting the active devices on a semiconductor substrate is replaced by a dissipative layer. Improved immunity to radiation induced single event upset of the active devices is thereby achieved.
In Silicon On Insulator Field Effect Transistors (SOIFETs) formed in thin layers of silicon so that the depletion layer extends through the silicon film, the threshold voltage can be influenced by a back gate voltage. Some previous technical work on the radiation hardness of SOI CMOS devices has concentrated on simply testing the effects of total radiation on the devices. To reduce the charging of the insulator layer, frequently, a back gate formed on the surface of the substrate opposite the insulating layer is biased negatively during irradiation. However, this bias voltage is not used for dynamic threshold voltage adjustment.
U.S. Pat. No. 4,763,183, issued Aug. 9, 1988, to Ng et al., recognizes the possibility of controlling the threshold voltage of conventional MOSFET devices by applying an appropriate back gate voltage. However, in SOI devices, control of the threshold voltage by such means is dismissed as being impractical because the insulating region prevents the conduction of charge from the active region into the substrate. Instead, NG et al. modify the structure of the SOI device so as to include a conductive pathway extending from the active volume through the insulating region and into the substrate. Then control of the threshold voltage may be effected by application of a voltage to the substrate.
The temperature stabilization of threshold voltage with back gate bias is mentioned in a publication entitled "High Temperature Microelectronics - Expanding the Applications for Smart Sensors" by Brown et al., 1987 IEDM meeting sponsored by the IEEE in Washington, D.C., pp., 274-277. The technique is considered feasible because threshold voltage is a decreasing function of temperature and a increasing function of back gate bias. Brown et al. applied the bias voltage to the body of the transistor to compensate for threshold shifts due to temperature variations.
U.S. Pat. No. 4,484,076, issued Nov. 20, 1984, to I. Thomson for "Direct Reading Dosimeter" discloses a dosimeter for measuring total radiation dose in which the radiation induced change in threshold voltage of a MOSFET is measured to determine the radiation dose rate and total radiation dosage. The source of the sensor MOSFET is connected to a constant current supply, the drain thereof is grounded, and means are provided for periodically switching the gate of the sensor between ground and +V. During the time the gate of the sensor is grounded, the source to drain voltage of the sensor is a measure of the threshold voltage. The source-drain voltage of the sensor is amplified in an operational amplifier and then either applied directly to an indicator or applied to a differentiating amplifier to determine dose rate. Thomson does not recognize that the threshold voltage in a thin film SOI device can be influenced by a back gate voltage and does not utilize the output of the sensor FET, nor the outputs of the amplifiers connected thereto, to generate a back gate voltage to compensate for radiation induced threshold voltage shifts.
The threshold voltage of Silicon on Insulator Field Effect Transistors (SOI FETs) may be described by an analytical formula contained in an abstract by Caviglia et al, entitled "Threshold Voltage in Very Thin SOIFETs", 1987 IEEE SOS/SOI Technology Workshop, Durango, Colo. Oct. 6-8, 1987.
In accordance with the present invention, means are provided for compensating for the threshold voltage shifts induced by radiation dosage in a Large Scale Integrated (LSI) circuit device made up of CMOS SOI FETs. The FETs of the device are formed in a relatively thin layer of silicon (50-1000 Å thick) on an insulating silicon oxide layer supported on the upper surface of a silicon substrate. A back gate voltage, controlled by the compensating means of the invention, is applied to a back gate, which may comprise the substrate, a metal layer imbedded in the insulating oxide opposite the channel regions of the FETs, or a reverse biased diode formed in the substrate opposite the channel areas of the FETs. The back gate voltage influences the threshold voltages of the FETs of the LSI device and is so controlled as to compensate for threshold voltage shifts induced by radiation dosage.
The compensating means of the invention includes a P-type FET (PFET) and an N-type FET (NFET) formed integrally with the LSI device. The FETs of the compensating means are each formed, as is conventional, with source, drain and gate electrodes. The drains of the FETs are connected together and the sources thereof are connected across a voltage source to form a voltage divider. The gates of the FETs are connected in common to a fixed input voltage so as to produce a particular voltage at the drains thereof prior to exposure to radiation. The drain voltage is applied as one input to an operational amplifier. A reference voltage, corresponding to the pre-exposure drain voltage of the FETs, is applied as a second input to the operational amplifier. The output of the operational amplifier is applied to the metal area of the substrate of the LSI device as a back gate voltage.
After accumulating a radiation dosage the characteristics of the FETs are altered, causing the voltage at the drains thereof to change, which results in a change in the output of the operational amplifier, and the back gate voltage of the LSI device, in such a sense as to restore the voltage at the FET drains to the pre-exposure value. The resultant change in the back gate voltage of the LSI device compensates for the threshold voltage shifts of the FETs of the LSI device that were engendered by the radiation dosage.
It is an object of the invention to provide, in SOI CMOS devices fabricated in very thin, lightly doped silicon films, means for controlling the back gate voltage thereof whereby threshold voltage shifts induced by radiation dosage may be compensated for.
It is another object of the invention to detect the shift of the threshold voltages of PMOS and NMOS FETs caused by total dose radiation and to provide a feedback circuit to vary the back gate voltage to the FETs for controlling the threshold voltages.
It is a further object of the invention to provide SOI CMOS devices fabricated in very thin, lightly doped SOI films so that the threshold voltage shifts due to total dose radiation for both the NMOS and PMOS devices is linearly related to the back gate voltages of the devices over a significant threshold voltage range, for example, over at least 1.5 volts.
FIG. 1 is a cross section of a CMOS SOI FET device;
FIG. 2 is a graph showing the threshold voltage v. back gate voltage of an SOI FET fabricated in a relatively thin layer of silicon, and the threshold voltage v. back gate voltage of a conventional SOI FET fabricated in a relatively thick layer of silicon;
FIG. 3 is a graph showing the threshold voltage v. back gate voltage for a PMOS FET and for an NMOS FET, both fabricated in relatively thin SOI films;
FIG. 4 is a schematic diagram of a circuit responsive to radiation dosage for controlling the voltage applied to the back gate of an LSI device, in accordance with the invention;
FIG. 5A is a cross section of a CMOS SOI device having separate back gates for the NMOS and PMOS FETs of the device;
FIG. 5B is a cross section of a variation of the device of FIG. 5A; and
FIG. 6 is a simplified schematic diagram of an embodiment of the invention for separately compensating for radiation induced threshold voltage shifts in the PMOS and NMOS FETs of a large scale CMOS integrated circuit, in accordance with the invention.
FIG. 1 is a cross section of a CMOS SOI incorporating a PMOS FET 10 and an NMOS FET 10'. The silicon-on-insulator (SOI) structure refers to layers of silicon 12, 12, (the silicon), which are isolated from one another for the PFETs and NFETs of the device, imposed on a layer 14 of silicon oxide (the insulator). Oxide layer 14 is supported by a semiconductor substrate 21, here silicon. The thickness of layer 14 may suitably be of the order of 5000 Å. Silicon layers 12, 12' are very thin, having a thickness of between 50-1000 Å and preferably of about 250 Å. Layer 12 may be either pure silicon or lightly doped with a P-type dopant. Layer 12' may be either pure silicon or lightly doped with an N-type dopant. Substrate 21 may be lightly or heavily doped with an N-type or P-type dopant. The dopant type and level is not of material importance to the invention. Here the substrate 21 is shown as being heavily doped with P type dopant.
As used herein, the term "lightly doped" means doping at a level of not greater than 1×10.sup.≠ atoms per cubic centimeter and the term "heavily doped" means doping at a level greater than 1×1019 atoms per cubic centimeter. Lightly doped regions in FIG. 1 are indicated by the symbol "P-" or "N-" and heavily doped regions are indicated by the symbol "P+" or "N+".
A source 17 and a drain 18 are formed in layer 12 by heavily doping those regions with P type dopant. A channel 16 separates the source 17 from the drain 18. An insulating layer 20 of silicon oxide overlies channel 16 and may extend completely over the source 17 and drain 18 A metal layer, extending over the channel 16, is superimposed on layer 20 to form a front gate 19. A metal area 23 on the lower surface of substrate 21 provides electrical contact to the substrate for applying a back gate voltage thereto. The entire substrate 21 serves as a back gate for all FETs, both NMOS and PMOS of the LSI device Leads 13, 15, 22, and 31 are conductively connected, respectively, to the source 17, drain 18, gate 19 and area 23 on substrate 21 to form source, drain, gate and back gate electrodes.
The NMOS FET 10' is similar in form to PMOS FET 10 and differs from PMOS FET 10 only in that the dopants used in silicon layer 12' for the source 17', drain 18', and channel 16' regions are of the N type and in that the channel dimensions may differ in length and width from those of the P type to account for differences in the mobilities of the different types of charge carriers, as is well known to those skilled in the art. The essential feature of both types of FETs is that the silicon layers 12, 12' be very thin, between 50-1000 Å in thickness, and preferably about 250 Å in thickness.
When the FETs, whether NMOS or PMOS, are formed in very thin layers of silicon, it is possible to influence the threshold by a bias voltage applied to the back gate of the device. On the other hand, when the FETs are formed in relatively thick films of silicon or in bulk silicon, variation of the back gate bias has virtually no influence on the threshold voltages of the devices.
FIG. 2 illustrates the difference between the threshold voltage v. back gate voltage characteristics for a PMOS FET fabricated in a relatively thin layer of silicon and a conventional PMOS FET fabricated in a relatively thick layer of silicon. Line 26 is the threshold voltage v. back gate voltage characteristic for a PMOS FET fabricated as described with reference to FIG. 1, where the silicon layer corresponding to layer 12 of FIG. 1 is 200 Å thick. Line 26 shows a substantially linear variation in threshold voltage from about 1.3 v. to about 2.8 v. for a variation in back gate voltage of from 0 to 28 v.
Line 24 is the threshold voltage v. back gate voltage characteristic for a PMOS FET similar to that of FIG. 1, except that the silicon layer corresponding to the layer 12 is 4000 Å thick. Line 24 shows a threshold voltage change of only about 0.25 volts for a change of back gate voltage of from 0 to 28 volts. It is evident that variation of the back gate voltage has virtually no influence on the threshold voltage of the FET fabricated in the relatively thick layer of silicon.
When a P-type FET has received a dose of radiation, the threshold voltage characteristic shifts negatively, as shown by the dotted line 25 for the FET fabricated in the thin layer of silicon, and by the dotted line 32 for the FET fabricated in the thick layer of silicon.
FIG. 3 shows the calculated and the measured threshold voltages v. back gate voltage for a P-type FET and an N-type FET, both of which are of the SOI-type fabricated in thin silicon layers. Curve 27 is the measured threshold voltage v. back gate voltage for a PFET fabricated in a layer 12 of silicon 200 Å thick on a silicon oxide layer 14 5000 Å thick. Front gate oxide layer 20 is 250 Å thick. Silicon layer 12 and substrate 21 are both lightly doped with P-type dopants and the source 17 and drain 18 are heavily doped with P-type dopant. Curve 28 is the calculated threshold voltage v. back voltage for the FET used to obtain the data for curve 27.
Curve 29 is the measured threshold voltage v. back gate voltage for an NFET similar in form to the PFET used for curve 27 except that the silicon layer 12 is 300 Å thick and that the P-type dopants are replaced by N-type dopants. Curve 30 is the calculated threshold voltage v. back gate voltage for the FET used to obtain the data for curve 29.
When a radiation dose has been accumulated by the PFET, the threshold voltage curve 27 shifts toward the dashed line 32 in a direction to cause the threshold voltage to become more negative. The threshold voltage curve 29 for the N-type FET also shifts toward the dashed line 32 after accumulating radiation dose, causing the threshold voltage to become more negative. Although it is not apparent from FIG. 3, the source to drain currents of both the P-type and the N-type FETs vary with back gate voltage in the same manner as is seen in the threshold voltage v. back gate voltage curves of FIG. 3. After reception of a radiation dose, these currents of both the P-type FET and the N-type FET shift in the same manner as the threshold voltages shift for the respective types of FETs, assuming that source to drain and front gate voltages remain unchanged. In effect, the source to drain impedances of both types of FETs change as a result of radiation dosage. The changes in impedances induced by radiation are similar to the radiation induced changes in the threshold voltages. Such changes in the impedances enable radiation dosage to be sensed and compensated for by controlling the back gate voltage so as to reduce the impedance changes. Such compensation simultaneously compensates for the radiation induced changes in threshold voltages.
FIG. 4 is a schematic diagram of a radiation dosage monitoring circuit for a LSI CMOS SOI device with means for controlling the common back gate voltage of all the FETs of the LSI device. The LSI device is not shown in FIG. 4 but it should be understood that all PMOS and NMOS FETs of the LSI device are formed on a common substrate and that the back gate voltage developed by the circuit of FIG. 4 is applied to the substrate, which comprises the back gate for all the FETs of the LSI device.
The circuit of FIG. 4 includes a pair of sensing FETs, PFET 10 and NFET 10', formed integrally with the LSI device. PFET 10 and NFET 10' are similar to those described with reference to FIG. 1, having source 13, 13', drain 15, 15' and gate 22, 22' electrodes. The silicon layer of the LSI device, corresponding to layer 12 of FIG. 1, may suitably be 250 Å thick. The oxide layer corresponding to layer 14 may suitably be 5000 Å thick and the front gate oxide layer corresponding to layer 20 may suitably be 250 Å thick. The source 13' of NFET 10' is grounded and the drain 15' thereof is connected to the drain 15 of PFET 10. The front gate electrodes 22, 22' of FETs 10, 10' are connected together by lead 34. Source electrode 13 of PFET 10 is connected to a positive voltage source VDD. Potentiometer 46 is connected between voltage source VDD and ground to provide an adjustable voltage on lead 34.
The commonly connected drains 15, 15' of FETs 10, 10' are connected to the inverting input 37 of an operational amplifier 38. A potentiometer 44, connected between voltage source VDD and ground, provides an adjustable reference voltage VR that is applied to the non-inverting input 39 of amplifier 38. Amplifier 38 receives positive and negative operating voltages +V, -V, on leads 40 and 41, respectively. The output Vb of amplifier 38 is connected by lead 31 to the metal area 23 of substrate 21 that forms the back gate electrodes of FETs 10, 10'.
Prior to exposure to radiation, a particular voltage will be developed at the commonly connected drains 15, 15, of FETs 10, 10', depending upon the relative source to drain impedances thereof. Potentiometer 44 is adjusted to provide a reference voltage on lead 39 equal to that particular voltage. As a radiation dose is accumulated, the relative impedances of the FETs change, causing the voltage on amplifier input 37 to increase above the value VR, in the example given.
The output Vb of amplifier 38 is given by:
Vb =-A(VR -V37)
V37 is the voltage on input 37 of amplifier 38; and
A is the gain of amplifier 38.
Consequently, Vb changes in a positive sense as a result of the radiation dose. As may be inferred from FIG. 3, such a change in Vb, the back gate voltage, tends to restore the relative impedances of PFET 10 and NFET 10' to their pre-exposure values. Such change in the back gate voltage compensates for the shift in threshold voltages of all FETs of the LSI device brought on by the radiation dose.
In alternative embodiments of the circuit of FIG. 4 (not shown in the drawings), either PFET 10 or NFET 10' may be replaced by a fixed impedance, such as a resistor. Such a modification may necessitate interchanging the connections to the inverting input 37 and non-inverting input 39 of operational amplifier 38, depending on whether PFET 10 or NFET 10' is replaced by the fixed impedance, as will be understood by those skilled in the art.
Although the circuit of FIG. 4 will usually serve to compensate for the dosage induced threshold voltage shifts of both the PFETs and the NFETs of a CMOS LSI device, in certain applications it may be desirable to provide separate compensation for the PFETs and the NFETs of the LSI device.
Where separate back gate biases are to be applied to the respective back gates of the PFETs and NFETs formed on a common substrate, the back gates of the respective FETs must be electrically isolated from one another to prevent current flow between the respective bias sources. FIGS. 5A and 5B illustrate two alternative means for electrically isolating the back gate of the PFETs from the back gate of the NFETs in an LSI device.
Referring to FIG. 5A, the FETs 10, 10' of the device are formed as described with reference to FIG. 1, except that the substrate 21 is doped with an N-type dopant. An area 52, extending on the top surface of substrate 21, over at least the channel regions 16' of all NFETs of the device is doped with a P-type dopant. The doping levels of substrate 21 and region 52 are not of material importance. A conductive lead 62, insulated from substrate 21, is connected to area 52 for application of a back gate bias potential thereto. Substrate 21 forms the back gate for all PFETs of the device. A conductive lead 70 is attached to metal area 23 on substrate 21 for application of a back gate bias potential to the substrate. So long as the bias potential on lead 70 is maintained more positive than the bias potential on lead 62, the junction between region 52 and substrate 21 forms a reverse biased diode and no current will flow between the respective back gate bias sources.
FIG. 5B illustrates an alternative means for isolating the back gates of the PFETs and NFETs of a device from one another.
The PFETs 10 and NFTEs 10' of the device are formed as described with reference to FIG. 1. A metal layer 52' is embedded in oxide layer 14 opposite at least the channel regions 16' of all NFETs of the device to form a back gate. Conductive lead 62' is attached to layer 52' for application of a back gate bias potential thereto.
As before, substrate 21 forms the back gate for all PFETs of the device. Lead 70 is attached to metal area 23 on substrate 21 for application of a back gate bias potential to the substrate. Oxide layer 14 completely insulates metal layer 52' from the substrate and it is unnecessary to maintain the bias levels of the respective back gates in any particular relationship in order to prevent current flow between the respective bias sources.
FIG. 6 is a simplified schematic diagram of an embodiment of the invention wherein separate compensation is made for threshold voltage shifts of the PFETs and the NFETS of CMOS SOI LSI device 51. It will be understood that in FIG. 6 the representation of the layout of the device 51 is very much simplified over what will be seen in actual practice since the locations of the PFETs and the NFETs of the device will be interspersed with one another in a complex pattern.
The PFETs 10 and NFETs 10' of the device 51 are formed as described with reference to FIG. 5A or 5B on a substrate 21 which forms a common back gate 23 for all PFETs of the device 51. The NFETs 10' of the device 51 are formed over a common back gate, either a P doped area 52, as shown in FIG. 5A, or a metal layer 52', as shown in FIG. 5B.
A circuit for controlling the back gate voltage of all PFETs 10 of the device 51 is comprised by sensor circuit 65 and operational amplifier 69, which together correspond to the alternate embodiment mentioned in connection with the description of FIG. 4. Sensor 65 includes a PFET 10, formed integrally with the other PFETs 10 of device 51 on substrate 21. The drain of PFET 35 is connected to voltage source VDD and the source of PFET 35 is connected through resistor 57 to ground. A potentiometer 46, connected to voltage source VDD, supplies an input voltage to the front gate of PFET 35. The source of PFET 35 is connected by lead 37 to the inverting input of operational amplifier 69. Potentiometer 44, connected to voltage source VDD, provides a reference voltage through lead 72 to the non-inverting input of amplifier 69.
Operational amplifier 69 generates an output voltage Vb in response to a change in the impedance of PFET 35 in the same manner as described with reference to FIG. 4. The output Vb of amplifier 69 is applied through lead 70 to substrate 21 to control the back gate voltage of all PFETs of the device 51 and thereby compensate for dosage induced changes in the threshold voltages of all such PFETs.
The circuit for controlling the back gate voltage of all NFETs of the device 51 includes a sensing circuit 55 and operational amplifier 59. A back gate 52, or 52', serves as a common back gate for all NFETs 10' of the device 51. Sensor circuit 55 includes an NFET 36 formed integrally with the other NFETs 10' of device 51 over the common back gate 52 or 52'. A resistor 56 is connected from voltage source VDD to the source of NFET 36 and the drain of NFET 36 is grounded. Potentiometer 46' supplies an input voltage to the front gate of NFET 36. The source of NFET 36 is connected by lead 58 to the non-inverting input of amplifier 59 and potentiometer 44' provides a reference voltage to the inverting input of amplifier 59 through lead 60.
When the impedance of NFET 36 changes due to radiation dosage, amplifier 59 generates an output voltage Vb ' that may change at a different rate or in the opposite sense from the change that occurs in the output voltage Vb of amplifier 69 as a result of the same radiation dosage. The output Vb ' of amplifier 59 is applied through lead 62 to the back gate 52 or 52' to control the back gate voltage of all NFETs of the device 51, including NFET 36, which tends to restore the impedance of NFET 36 to its original value, thereby simultaneously compensating for changes in the threshold voltages of all NFETs of the device 51 caused by radiation dosage. Obviously, variations in the invention are possible in the light of the above teachings. It is to be understood that the invention may be practiced otherwise than as specifically disclosed without departing from the spirit and scope of the appended claims.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US4484076 *||Nov 13, 1981||Nov 20, 1984||Canadian Astronautics Limited||Direct reading dosimeter|
|US4763183 *||Oct 24, 1986||Aug 9, 1988||American Telephone And Telegraph Co., At&T Bell Laboratories||Semiconductor-on-insulator (SOI) devices and SOI IC fabrication method|
|US4866498 *||Apr 20, 1988||Sep 12, 1989||The United States Department Of Energy||Integrated circuit with dissipative layer for photogenerated carriers|
|US4875086 *||May 22, 1987||Oct 17, 1989||Texas Instruments Incorporated||Silicon-on-insulator integrated circuits and method|
|US4907053 *||Aug 27, 1987||Mar 6, 1990||Tadahiro Ohmi||Semiconductor integrated circuit|
|US4914491 *||Jun 29, 1989||Apr 3, 1990||Kopin Corporation||Junction field-effect transistors formed on insulator substrates|
|1||*||IEDM Conference Proceedings, Dec. 1987, pp. 274 277, by Brown et al.|
|2||IEDM Conference Proceedings, Dec. 1987, pp. 274-277, by Brown et al.|
|3||*||IEEE SOS/SOI Technology Workshop, Oct. 1987, by Caviglia et al., p. 80.|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US5185535 *||Jun 17, 1991||Feb 9, 1993||Hughes Aircraft Company||Control of backgate bias for low power high speed CMOS/SOI devices|
|US5294821 *||Oct 8, 1991||Mar 15, 1994||Seiko Epson Corporation||Thin-film SOI semiconductor device having heavily doped diffusion regions beneath the channels of transistors|
|US5359219 *||Dec 4, 1992||Oct 25, 1994||Texas Instruments Incorporated||Silicon on insulator device comprising improved substrate doping|
|US5426062 *||Jun 29, 1994||Jun 20, 1995||Texas Instruments Incorporated||Method for forming a silicon on insulator device|
|US5519336 *||Dec 6, 1994||May 21, 1996||Honeywell Inc.||Method for electrically characterizing the insulator in SOI devices|
|US5682118 *||Mar 24, 1995||Oct 28, 1997||C.S.E.M. Centre Suisse D'electronique Et De Microtechnique S.A.||Circuit for controlling the voltages between well and sources of the transistors of and MOS logic circuit, and system for slaving the power supply to the latter including the application thereof|
|US5917221 *||Nov 30, 1994||Jun 29, 1999||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and method for forming the same|
|US6051452 *||Jan 6, 1998||Apr 18, 2000||Kabushiki Kaisha Toshiba||Method for manufacturing a semiconductor device with ion implantation|
|US6147508 *||Aug 20, 1998||Nov 14, 2000||International Business Machines Corp.||Power consumption control mechanism and method therefor|
|US6239649||Apr 20, 1999||May 29, 2001||International Business Machines Corporation||Switched body SOI (silicon on insulator) circuits and fabrication method therefor|
|US6275094||Jun 22, 1999||Aug 14, 2001||International Business Machines Corporation||CMOS device and circuit and method of operation dynamically controlling threshold voltage|
|US6340830||Jan 27, 1999||Jan 22, 2002||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and method for forming the same|
|US6404269||Sep 17, 1999||Jun 11, 2002||International Business Machines Corporation||Low power SOI ESD buffer driver networks having dynamic threshold MOSFETS|
|US6487701||Nov 13, 2000||Nov 26, 2002||International Business Machines Corporation||System and method for AC performance tuning by thereshold voltage shifting in tubbed semiconductor technology|
|US6501097||Sep 17, 1999||Dec 31, 2002||Semiconductor Energy Laboratory Co., Ltd.||Electro-optical device|
|US6528852||Oct 24, 2001||Mar 4, 2003||Semiconductor Energy Laboratory Co., Ltd.||Double gated electronic device and method of forming the same|
|US6628159||Sep 17, 1999||Sep 30, 2003||International Business Machines Corporation||SOI voltage-tolerant body-coupled pass transistor|
|US6777753||Jul 12, 2000||Aug 17, 2004||The United States Of America As Represented By The Secretary Of The Navy||CMOS devices hardened against total dose radiation effects|
|US6800873||Dec 3, 2002||Oct 5, 2004||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and electronic device|
|US6815772||Dec 17, 2002||Nov 9, 2004||Semiconductor Energy Laboratory Co., Ltd.||Dual gate MOSFET|
|US6835586||Apr 19, 2001||Dec 28, 2004||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US6914302||Apr 19, 2001||Jul 5, 2005||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and manufacturing method thereof|
|US7102164||Aug 31, 2004||Sep 5, 2006||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device having a conductive layer with a light shielding part|
|US7276730||Apr 19, 2001||Oct 2, 2007||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device having a pixel matrix circuit that includes a pixel TFT and a storage capacitor|
|US7423291||Aug 22, 2006||Sep 9, 2008||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and electronic device|
|US7675348 *||Dec 4, 2007||Mar 9, 2010||Panasonic Corporation||Semiconductor integrated circuit apparatus which is capable of controlling a substrate voltage under low source voltage driving a miniaturized MOSFET|
|US7999603||Jan 12, 2010||Aug 16, 2011||Panasonic Corporation||Semiconductor integrated circuit apparatus which is capable of controlling a substrate voltage under the low source voltage driving of a miniaturized MOSFET|
|US8080805 *||Mar 9, 2010||Dec 20, 2011||International Business Machines Corporation||FET radiation monitor|
|US8158980||Jul 30, 2007||Apr 17, 2012||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device having a pixel matrix circuit that includes a pixel TFT and a storage capacitor|
|US8319715||Sep 5, 2008||Nov 27, 2012||Semiconductor Energy Laboratory Co., Ltd.||Active matrix type liquid crystal display device|
|US8361829||Aug 31, 2011||Jan 29, 2013||International Business Machines Corporation||On-chip radiation dosimeter|
|US8415743||May 24, 2011||Apr 9, 2013||International Business Machines Corporation||ETSOI CMOS with back gates|
|US8476683||Aug 8, 2012||Jul 2, 2013||International Business Machines Corporation||On-chip radiation dosimeter|
|US8530287||Sep 12, 2012||Sep 10, 2013||International Business Machines Corporation||ETSOI CMOS with back gates|
|US8552500||May 24, 2011||Oct 8, 2013||International Business Machines Corporation||Structure for CMOS ETSOI with multiple threshold voltages and active well bias capability|
|US8614111||Jul 25, 2011||Dec 24, 2013||International Business Machines Corporation||Fully depleted silicon on insulator neutron detector|
|US8643015||Apr 10, 2012||Feb 4, 2014||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device having a pixel matrix circuit that includes a pixel TFT and a storage capacitor|
|US8975952 *||Nov 13, 2012||Mar 10, 2015||Honeywell International Inc.||CMOS logic circuit using passive internal body tie bias|
|US20020139978 *||Apr 19, 2001||Oct 3, 2002||Shunpei Yamazaki||Semiconductor device and manufacturing method thereof|
|US20030116766 *||Dec 3, 2002||Jun 26, 2003||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and electronic device|
|US20030122194 *||Dec 17, 2002||Jul 3, 2003||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and method for forming the same|
|US20060284221 *||Aug 22, 2006||Dec 21, 2006||Semiconductor Energy Laboratory Co., Ltd.||Semiconductor device and electronic device|
|US20080088357 *||Dec 4, 2007||Apr 17, 2008||Matsushita Electric Industrial Co., Ltd.||Semiconductor integrated circuit apparatus|
|US20110220805 *||Mar 9, 2010||Sep 15, 2011||International Business Machines Corporation||Fet radiation monitor|
|EP0994564A1 *||Oct 5, 1999||Apr 19, 2000||Lucent Technologies Inc.||Inverter circuit with duty cycle control|
|WO1994015364A1 *||Dec 29, 1993||Jul 7, 1994||Honeywell Inc||Depletable semiconductor on insulator low threshold complementary transistors|
|U.S. Classification||257/348, 257/E29.275, 257/350, 257/349, 257/906, 257/E27.112|
|International Classification||H01L29/786, H01L27/12|
|Cooperative Classification||Y10S257/906, H01L29/78648, H01L27/1203|
|European Classification||H01L29/786D2, H01L27/12B, H01L29/786D|
|Dec 13, 1990||AS||Assignment|
Owner name: ALLIED-SIGNAL INC., NEW JERSEY
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:CAVIGLIA, ANTHONY L.;CSERHATI, ANDRAS F.;MC KITTERICK, JOHN B.;REEL/FRAME:005716/0660
Effective date: 19901207
|Sep 20, 1995||FPAY||Fee payment|
Year of fee payment: 4
|Oct 4, 1999||FPAY||Fee payment|
Year of fee payment: 8
|Sep 26, 2003||FPAY||Fee payment|
Year of fee payment: 12