I.M. Abdel-Motaleb, J. Lavrencik 
Department of Electrical Engineering, Northern Illinois University, DeKalb, IL, USA
There is urgent need to monitor dental and oral diseases, such as tooth decay, gum diseases, and teeth grinding. Such monitoring can be achieved by embedding sensors in the mouth. This technique faces some difficulties. The first is how the power needed for the operation of the sensors and the associated electronic chips can be generated. This power can be generated using the pressure exerted by ...
A. Ricci, E. Giuri, and C. Ricciardi
Microcantilevers made of crystal silicon are probably the most diffused type of MEMS because of their simple fabrication and their vast applications. In this presentation we treat the mechanical behaviour of silicon mirocantilevers, and also give an overview of the many application areas that these apply to.
E. Gutierrez-Miravete, and J. Streeter
Department of Engineering and Science, Rensselaer at Hartford, Hartford, Connecticut, USA
Optiwind, Torrington, Connecticut, USA
The bearing and shaft are part of a safe and arm device constructed as an assembly by a multi-layer additive/subtractive plating and planarization processes (EFAB technology). Devices are constructed by a multi-layer additive/subtractive planarization process. This paper evaluates the lubricating flow between the shaft and journal of the MEMS bearing for seven configurations. The pressure ...
Pryor Knowledge Systems, Inc.
COMSOL, Certified Partner
Efficient, effective, and functional operation of autonomous systems requires a comprehensive real-time understanding, by those systems, of the embedding environment. This paper presents a brief overview of the multiphysics considerations involved in the development of models for thermoresistive and magnetoresistive sensors systems.
A. M. Morega1, J. C. Ordonez2, and M. Morega1
1Politehnica University of Bucharest, Bucharest, Romania
2Florida State University, Tallahassee, FL, USA
In this paper, we present a FEM model of a mixing MEMS μTAS device. A quasistatic magnetic field, produced by sequentially switched DC currents advected through conductors embedded in the device substrate beneath the flow channel, is used to mix the working magnetic fluid, while it is forced to flow through a rib walled channel. The body forces in the magnetized fluid perturb the otherwise ...
N. Al Cheikh, P. Xavier, J. Duchamp, and K. Schuster
Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Grenoble, France
Institute of Millimetrics Radio Astronomy (IRAM), Grenoble, France
Superconducting GHz electronics circuits are frequently used in Radio Astronomy instrumentation. The features of these instrumentations can be significantly improved by using tuneable capacitances, which can be realized by electrically actuated, micromechanical bridges (MEMS) made of superconducting Niobium (Nb). In order to analyze the electromechanical behavior of such devices and the intrinsic ...
Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...
J. Golebiowski, S. Milcarz
 Department of Semiconductor and Optoelectronics Devices, Technical University of Lodz, Lodz, Poland
The silicon cantilever with the planar coil was applied to the magnetic flux density measurements. The influence of shape and dimensions of planar coil on magnetic energy density was described. In cause of magnetic anisotropy of analyzed silicon structure FEM method and couple field method was applied in simulation. The Lorentz force based sensors owing to their potentially simpler fabrication ...
C. Tonry, M. K. Patel, C. Bailey, M. P.Y. Desmuliez, W. Yu
Computational Mechanics and Reliability Group (CMRG), School of Computing and Mathematical Sciences, University of Greenwich, London, United Kingdom
Microsystems Engineering Centre (MISCEC, School of Engineering & Physical Sciences, Heriot Watt University, Earl Mountbatten Building, Edinburgh, United Kingdom
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, China
Electric Field Assisted Capillarity (EFAC) is a novel technique for the fabrication of hollow polymer microstructures. It has advantages over current methods as it is a single step process. Hollow microstructures have many uses in industry from microchannels and microcapsules in BioMEMS to fibre-optical waveguides. It makes use of the dielectric properties of polymers combined with a heavily ...
H. T. D. Grigg, T. H. Hanley, B. J. Gallacher
Newcastle University, Newcastle, Tyne and Wear, UK
This work enunciates the principles of SAW design from a physical perspective, examining the standard engineering modelling assumptions in some detail. An integral form analytical expression based on 2D elastic isotropic theory is validated against a COMSOL Multiphysics® simulation, corresponding to the traditional COM approach. Next, a COMSOL model of the full 3D problem, including anisotropy, ...