<s>
Surface	B-Algorithm
acoustic	I-Algorithm
wave	I-Algorithm
sensors	I-Algorithm
are	O
a	O
class	O
of	O
microelectromechanical	B-Architecture
systems	I-Architecture
(	O
MEMS	B-Architecture
)	O
which	O
rely	O
on	O
the	O
modulation	O
of	O
surface	O
acoustic	O
waves	O
to	O
sense	O
a	O
physical	O
phenomenon	O
.	O
</s>
<s>
Most	O
modern	O
surface	B-Algorithm
acoustic	I-Algorithm
wave	I-Algorithm
sensors	I-Algorithm
use	O
an	O
input	O
interdigitated	O
transducer	O
(	O
IDT	O
)	O
to	O
convert	O
an	O
electrical	O
signal	O
into	O
an	O
acoustic	O
wave	O
.	O
</s>
<s>
The	O
structure	O
of	O
the	O
basic	O
surface	B-Algorithm
acoustic	I-Algorithm
wave	I-Algorithm
sensor	I-Algorithm
allows	O
for	O
the	O
phenomena	O
of	O
pressure	O
,	O
strain	O
,	O
torque	O
,	O
temperature	O
,	O
and	O
mass	O
to	O
be	O
sensed	O
.	O
</s>
<s>
The	O
inherent	O
functionality	O
of	O
a	O
surface	B-Algorithm
acoustic	I-Algorithm
wave	I-Algorithm
sensor	I-Algorithm
can	O
be	O
extended	O
by	O
the	O
deposition	O
of	O
a	O
thin	O
film	O
of	O
material	O
across	O
the	O
delay	O
line	O
which	O
is	O
sensitive	O
to	O
the	O
physical	O
phenomena	O
of	O
interest	O
.	O
</s>
<s>
If	O
a	O
film	O
of	O
magnetostrictive	O
material	O
is	O
deposited	O
in	O
the	O
delay	O
line	O
of	O
a	O
surface	B-Algorithm
acoustic	I-Algorithm
wave	I-Algorithm
sensor	I-Algorithm
,	O
the	O
change	O
in	O
length	O
of	O
the	O
deposited	O
film	O
in	O
response	O
to	O
a	O
change	O
in	O
the	O
magnetic	O
field	O
will	O
stress	O
the	O
underlying	O
substrate	O
.	O
</s>
