<s>
Nanosphere	B-Algorithm
lithography	I-Algorithm
(	O
NSL	O
)	O
is	O
an	O
economical	O
technique	O
for	O
generating	O
single-layer	O
hexagonally	O
close	O
packed	O
or	O
similar	O
patterns	O
of	O
nanoscale	O
features	O
.	O
</s>
