<s>
Multilayer	B-Algorithm
soft	I-Algorithm
lithography	I-Algorithm
(	O
MSL	O
)	O
is	O
a	O
fabrication	O
process	O
in	O
which	O
microscopic	O
chambers	O
,	O
channels	O
,	O
valves	O
and	O
vias	O
are	O
molded	O
within	O
bonded	O
layers	O
of	O
elastomer	O
.	O
</s>
