<s>
A	O
microscanner	B-Algorithm
,	O
or	O
micro	O
scanning	O
mirror	O
,	O
is	O
a	O
microoptoelectromechanical	O
system	O
(	O
MOEMS	O
)	O
in	O
the	O
category	O
of	O
micromirror	O
actuators	B-Algorithm
for	O
dynamic	O
light	O
modulation	B-Application
.	O
</s>
<s>
Depending	O
upon	O
the	O
type	O
of	O
microscanner	B-Algorithm
,	O
the	O
modulatory	O
movement	O
of	O
a	O
single	O
mirror	O
can	O
be	O
either	O
translatory	O
or	O
rotational	O
,	O
on	O
one	O
or	O
two	O
axes	O
.	O
</s>
<s>
Microscanners	B-Algorithm
are	O
different	O
from	O
spatial	O
light	O
modulators	B-Application
and	O
other	O
micromirror	O
actuators	B-Algorithm
which	O
need	O
a	O
matrix	O
of	O
individually	O
addressable	O
mirrors	O
in	O
order	O
to	O
accomplish	O
the	O
desired	O
modulation	B-Application
at	O
any	O
yield	O
.	O
</s>
<s>
If	O
a	O
single	O
array	O
mirror	O
accomplishes	O
the	O
desired	O
modulation	B-Application
but	O
is	O
operated	O
in	O
parallel	O
with	O
other	O
array	O
mirrors	O
to	O
increase	O
light	O
yield	O
,	O
then	O
the	O
term	O
microscanner	B-Algorithm
array	O
is	O
used	O
.	O
</s>
<s>
Larger	O
mirror	O
apertures	B-General_Concept
with	O
side	O
measurements	O
of	O
up	O
to	O
approx	O
.	O
</s>
<s>
The	O
deflection	O
movement	O
is	O
either	O
resonant	B-Application
or	O
quasi-static	O
.	O
</s>
<s>
With	O
microscanners	B-Algorithm
that	O
are	O
capable	O
of	O
tilting	O
movement	O
,	O
light	O
can	O
be	O
directed	O
over	O
a	O
projection	O
plane	O
.	O
</s>
<s>
For	O
these	O
applications	O
,	O
actuation	O
using	O
a	O
Lissajous	O
pattern	O
can	O
accomplish	O
sinusoidal	O
scan	O
motion	O
,	O
or	O
double	O
resonant	B-Application
operation	O
.	O
</s>
<s>
Translational	O
(	O
piston	O
type	O
)	O
microscanners	B-Algorithm
,	O
can	O
attain	O
a	O
mechanical	O
stroke	O
of	O
up	O
to	O
approx	O
.	O
</s>
<s>
For	O
high	O
end	O
display	O
applications	O
the	O
common	O
choice	O
is	O
raster	O
scanning	O
,	O
where	O
a	O
resonant	B-Application
scanner	O
(	O
for	O
the	O
longer	O
display	O
dimension	O
)	O
is	O
paired	O
with	O
quasi-static	O
scanner	O
(	O
for	O
the	O
shorter	O
dimension	O
)	O
.	O
</s>
<s>
Specifically	O
,	O
the	O
mechanical	O
solutions	O
required	O
for	O
resonant	B-Application
scanning	O
are	O
very	O
different	O
for	O
those	O
of	O
quasi-static	O
scanning	O
.	O
</s>
<s>
Thermoelectric	O
actuators	B-Algorithm
are	O
not	O
applicable	O
for	O
high-frequency	O
resonant	B-Application
scanners	O
,	O
but	O
the	O
other	O
three	O
principles	O
can	O
be	O
applied	O
to	O
the	O
full	O
spectrum	O
of	O
applications	O
.	O
</s>
<s>
For	O
resonant	B-Application
scanners	O
,	O
one	O
often	O
employed	O
configuration	O
is	O
the	O
indirect	O
drive	O
.	O
</s>
<s>
Indirect	O
drives	O
have	O
been	O
implemented	O
for	O
electromagnetic	O
,	O
electrostatic	O
,	O
as	O
well	O
as	O
piezoelectric	O
actuators	B-Algorithm
.	O
</s>
<s>
Electrostatic	O
actuators	B-Algorithm
offer	O
high	O
power	O
similar	O
to	O
electromagnetic	O
drives	O
.	O
</s>
<s>
As	O
a	O
rule	O
of	O
thumb	O
,	O
vertical	O
comb	B-Algorithm
drives	I-Algorithm
are	O
utilized	O
here	O
.	O
</s>
<s>
For	O
that	O
reason	O
many	O
highly	O
developed	O
microscanners	B-Algorithm
today	O
utilize	O
a	O
resonant	B-Application
mode	O
of	O
operation	O
,	O
where	O
an	O
eigenmode	O
is	O
activated	O
.	O
</s>
<s>
Resonant	B-Application
operation	O
is	O
the	O
most	O
energy-efficient	O
.	O
</s>
<s>
Magnetic	O
actuators	B-Algorithm
offer	O
very	O
good	O
linearity	O
of	O
the	O
tilt	O
angle	O
versus	O
the	O
applied	O
signal	O
amplitude	O
,	O
both	O
in	O
static	O
and	O
dynamic	O
operation	O
.	O
</s>
<s>
The	O
working	O
principle	O
is	O
that	O
a	O
metallic	O
coil	O
is	O
placed	O
on	O
the	O
moving	O
MEMS	B-General_Concept
mirror	O
itself	O
and	O
as	O
the	O
mirror	O
is	O
placed	O
in	O
a	O
magnetic	O
field	O
,	O
the	O
alternating	O
current	O
flowing	O
in	O
the	O
coil	O
generates	O
Lorentz	O
force	O
that	O
tilts	O
the	O
mirror	O
.	O
</s>
<s>
Magnetic	O
actuation	O
can	O
either	O
be	O
used	O
for	O
actuating	O
1D	O
or	O
2D	O
MEMS	B-General_Concept
mirrors	O
.	O
</s>
<s>
Another	O
characteristic	O
of	O
the	O
magnetically	O
actuated	O
MEMS	B-General_Concept
mirror	O
is	O
the	O
fact	O
that	O
low	O
voltage	O
is	O
required	O
(	O
below	O
5V	O
)	O
making	O
this	O
actuation	O
compatible	O
with	O
standard	O
CMOS	O
voltage	O
.	O
</s>
<s>
An	O
advantage	O
of	O
such	O
an	O
actuation	O
type	O
is	O
that	O
MEMS	B-General_Concept
behaviour	O
does	O
not	O
present	O
hysteresis	O
,	O
as	O
opposed	O
to	O
electrostatic	O
actuated	O
MEMS	B-General_Concept
mirrors	O
,	O
which	O
make	O
it	O
very	O
simple	O
to	O
control	O
.	O
</s>
<s>
Power	O
consumption	O
of	O
magnetically	O
actuated	O
MEMS	B-General_Concept
mirrors	O
can	O
be	O
as	O
low	O
as	O
0.04mW	O
.	O
</s>
<s>
Also	O
thermal	O
actuators	B-Algorithm
are	O
not	O
suitable	O
for	O
high	O
frequency	O
operation	O
due	O
to	O
significant	O
low	B-Algorithm
pass	I-Algorithm
behaviour	O
.	O
</s>
<s>
Piezoelectric	O
drives	O
produce	O
high	O
force	O
,	O
but	O
as	O
with	O
electrothermal	O
actuators	B-Algorithm
the	O
stroke	O
length	O
is	O
short	O
.	O
</s>
<s>
For	O
resonant	B-Application
rotational	O
scanners	O
,	O
on	O
the	O
other	O
hand	O
,	O
scanners	O
using	O
piezoelectric	O
actuation	O
combined	O
with	O
an	O
indirect	O
drive	O
are	O
the	O
highest	O
performer	O
in	O
terms	O
of	O
scan	O
angle	O
and	O
working	O
frequency	O
.	O
</s>
<s>
thumb|LDC	O
module	O
with	O
1D	O
microscanner	B-Algorithm
and	O
integrated	O
optical	O
position	O
sensor	O
on	O
the	O
back	O
side	O
thumb|An	O
electrostatic	O
2D	O
microscanner	B-Algorithm
in	O
a	O
DIL20	O
casing	O
thumb|MEMS	O
scanner	O
module	O
for	O
3D	O
distance	O
measurement	O
(	O
LIDAR	O
)	O
with	O
a	O
single	O
sending	O
mirror	O
(	O
mirror	O
dimensions	O
approx	O
.	O
</s>
<s>
(	O
9.5	O
×	O
2.5	O
mm	O
)	O
)	O
and	O
a	O
synchronized	O
microscanner	B-Algorithm
array	O
(	O
2	O
×	O
7	O
)	O
as	O
receiver	O
unit	O
.	O
</s>
<s>
Applications	O
for	O
tilting	O
microscanners	B-Algorithm
are	O
numerous	O
and	O
include	O
:	O
</s>
<s>
Some	O
of	O
the	O
applications	O
for	O
piston	O
type	O
microscanners	B-Algorithm
are	O
:	O
</s>
<s>
thumb|Wafer	O
with	O
resonant	B-Application
microscanners	B-Algorithm
,	O
ready-processed	O
with	O
the	O
Fraunhofer	O
AME75	O
process	O
(	O
based	O
on	O
blank	O
BSOI	O
wafers	B-Architecture
)	O
,	O
before	O
dicing	O
the	O
devices	O
.	O
</s>
<s>
thumb|Detail	O
of	O
a	O
wafer	B-Architecture
with	O
VarioS	O
microscanners	B-Algorithm
,	O
developed	O
and	O
produced	O
based	O
on	O
a	O
modular	O
fabrication	O
system	O
at	O
Fraunhofer	O
IPMS	O
.	O
</s>
<s>
Microscanners	B-Algorithm
are	O
usually	O
manufactured	O
with	O
surface	O
or	O
bulk	O
micromechanic	O
processes	O
.	O
</s>
<s>
As	O
a	O
rule	O
,	O
silicon	B-Architecture
or	O
BSOI	O
(	O
bonded	O
silicon	B-Algorithm
on	I-Algorithm
insulator	I-Algorithm
)	O
are	O
used	O
.	O
</s>
<s>
Microscanners	B-Algorithm
are	O
smaller	O
,	O
lower	O
mass	O
,	O
and	O
consume	O
smaller	O
amounts	O
of	O
power	O
compared	O
to	O
macroscopic	O
light	O
modulators	B-Application
such	O
as	O
galvanometer	O
scanners	O
.	O
</s>
<s>
Additionally	O
,	O
microscanners	B-Algorithm
can	O
be	O
integrated	O
with	O
other	O
electronic	O
components	O
such	O
as	O
position	O
sensors	O
.	O
</s>
<s>
Microscanners	B-Algorithm
are	O
resistant	O
to	O
environmental	O
influences	O
,	O
and	O
can	O
tolerate	O
humidity	O
,	O
dust	O
,	O
physical	O
shocks	O
in	O
some	O
models	O
up	O
to	O
2500g	O
,	O
and	O
can	O
operate	O
in	O
temperatures	O
from	O
-20	O
°C	O
to	O
+80°C	O
.	O
</s>
<s>
With	O
current	O
manufacturing	O
technology	O
microscanners	B-Algorithm
can	O
suffer	O
from	O
high	O
costs	O
and	O
long	O
lead	O
times	O
to	O
delivery	O
.	O
</s>
