<s>
A	O
MEMS	B-Algorithm
thermal	I-Algorithm
actuator	I-Algorithm
is	O
a	O
microelectromechanical	O
device	O
that	O
typically	O
generates	O
motion	O
by	O
thermal	O
expansion	O
amplification	O
.	O
</s>
<s>
Usually	O
fabricated	O
out	O
of	O
doped	B-Algorithm
single	O
crystal	O
silicon	O
or	O
polysilicon	O
as	O
a	O
complex	O
compliant	O
member	O
,	O
the	O
increase	O
in	O
temperature	O
can	O
be	O
achieved	O
internally	O
by	O
electrical	O
resistive	O
heating	O
or	O
something	O
by	O
a	O
heat	O
source	O
capable	O
of	O
locally	O
introducing	O
heat	O
.	O
</s>
