<s>
The	O
list	O
below	O
provides	O
a	O
comprehensive	O
overview	O
of	O
companies	O
that	O
develop	O
and	O
fabricate	O
MEMS	B-Architecture
(	O
microelectromechanical	B-Architecture
systems	I-Architecture
)	O
devices	O
.	O
</s>
<s>
These	O
companies	O
are	O
usually	O
referred	O
to	O
the	O
concept	O
of	O
foundries	B-Algorithm
.	O
</s>
<s>
The	O
attribute	O
type	O
is	O
for	O
Integrated	B-Algorithm
Device	I-Algorithm
Manufacturer	I-Algorithm
,	O
Pure-play	O
or	O
Research	O
Institute	O
business	O
model	O
.	O
</s>
<s>
Company	O
Service	O
Substrate	O
materials	O
Production	O
volume	O
Wafer	O
diameters	O
(	O
in	O
inches	O
)	O
Type	O
Headquartered	O
country	O
Asia	O
Pacific	O
Microsystems	O
,	O
Inc	O
.	O
MEMS	B-Architecture
Foundry	B-Algorithm
Silicon	O
,	O
Sapphire	O
,	O
SOI	O
,	O
Glass	O
,	O
Quartz	O
,	O
Polymer	O
,	O
CMOS-wafers	O
High	O
volume	O
production	O
6	O
Pure-play	O
Atomica	O
MEMS	B-Architecture
,	O
biochip	O
,	O
sensor	O
and	O
photonics	O
manufacturing	O
,	O
including	O
custom	O
design	O
,	O
development	O
,	O
prototyping	O
,	O
and	O
high-volume	O
production	O
Silicon	O
,	O
SOI	O
,	O
borosilicate	O
,	O
fused	O
silica	O
,	O
quartz	O
,	O
glass	O
,	O
piezo	O
,	O
and	O
engineered	O
substrates	O
High-volume	O
production	O
6	O
,	O
8	O
Pure-play	O
C2MI	O
Customized	O
MEMS	B-Architecture
:	O
process	O
,	O
manufacturing	O
,	O
packaging	O
,	O
characterization	O
,	O
failure	O
analysis	O
and	O
reliability	O
.	O
</s>
<s>
8	O
Research	O
Institute	O
CEA-Leti	O
Customized	O
MEMS	B-Architecture
,	O
NEMS	O
,	O
BioMEMS	O
:	O
design	O
,	O
process	O
,	O
manufacturing	O
,	O
characterization	O
,	O
and	O
packaging	O
Silicon	O
,	O
SOI	O
,	O
glass	O
,	O
and	O
CMOS-wafers	O
.	O
</s>
<s>
8	O
,	O
12	O
Research	O
Institute	O
CSEM	O
MEMS	B-Architecture
design	O
&	O
process	O
development	O
,	O
Lab-to-Fab	O
approach	O
.	O
</s>
<s>
Prototyping	O
,	O
small	O
&	O
medium	O
volume	O
production	O
6	O
Research	O
Institute	O
Fraunhofer	O
Institute	O
for	O
Silicon	O
Technology	O
(	O
ISIT	O
)	O
MEMS	B-Architecture
design	O
&	O
process	O
development	O
,	O
main	O
Fraunhofer	O
site	O
for	O
post-CMOS	O
,	O
MEMS	B-Architecture
,	O
electroplating	O
,	O
CMP	O
Silicon	O
,	O
SOI	O
,	O
glass	O
,	O
GaN	O
and	O
CMOS	O
.	O
</s>
<s>
Proof-of-concept	O
,	O
prototyping	O
,	O
small	O
volume	O
production	O
8	O
Research	O
Institute	O
Fraunhofer	O
Institute	O
for	O
Microelectronic	O
Circuits	O
and	O
Systems	O
(	O
IMS	O
)	O
MEMS	B-Architecture
design	O
&	O
process	O
development	O
,	O
Fraunhofer	O
focus	O
location	O
for	O
specialized	O
MEMS-processes	O
Silicon	O
,	O
SOI	O
.	O
</s>
<s>
Proof-of-concept	O
,	O
Prototyping	O
,	O
small	O
volume	O
production	O
8	O
Research	O
Institute	O
Hanking	O
Electronics	O
Class	O
100	O
MEMS	B-Architecture
Foundry	B-Algorithm
Services	O
,	O
MEMS	B-Architecture
IMUs	O
(	O
6	O
DoF	O
accelerometers/	O
gyroscopes	O
)	O
,	O
IoT	O
modules	O
and	O
MEMS	B-Architecture
Design	O
Services	O
.	O
</s>
<s>
Foundry	B-Algorithm
processes	O
include	O
;	O
Film	O
Deposition	O
,	O
Metal	O
Deposition	O
,	O
Thermal	O
,	O
Wafer	O
Bonding	O
,	O
Etch	O
processes	O
including	O
DRIE	O
and	O
VHF	O
,	O
Wet	O
Processes	O
,	O
and	O
Wafer	O
Level	O
Packaging	O
.	O
</s>
<s>
Silicon	O
High	O
volume	O
production	O
8	O
IDM	O
IMEC	O
Low-medium	O
volume	O
MEMS	B-Architecture
manufacturing	O
(	O
CMOS	O
compatible	O
)	O
,	O
incl	O
.	O
</s>
<s>
custom	O
design	O
,	O
development	O
,	O
post-processing	O
and	O
prototyping	O
Si	O
,	O
SOI	O
,	O
fused	O
silica	O
or	O
glass	O
;	O
post-processing	O
on	O
CMOS	O
wafers	O
(	O
8-inch	O
to	O
12-inch	O
)	O
Prototyping	O
,	O
low	O
and	O
medium	O
volume	O
production	O
;	O
transfer	O
to	O
foundry	B-Algorithm
for	O
high	O
volume	O
8	O
,	O
12	O
Research	O
Institute	O
Micronit	O
GmbH	O
Customised	O
MEMS	B-Architecture
design	O
and	O
manufacturing	O
Silicon	O
and	O
SOI	O
,	O
borosilicate	O
glass	O
or	O
quartz	O
,	O
structured	O
wafer	O
Prototyping	O
and	O
middle-sized	O
batch	O
production	O
6	O
,	O
8	O
Pure-play	O
LioniX	O
International	O
Customized	O
MEMS	B-Architecture
design	O
,	O
custom	O
process	O
development	O
,	O
prototyping	O
and	O
production	O
.	O
</s>
<s>
4	O
,	O
6	O
Pure-play	O
Mapper	O
MEMS	B-Architecture
process	O
development	O
and	O
manufacturing	O
Silicon	O
,	O
SOI	O
and	O
various	O
glasses	O
,	O
piezoelectric	O
materials	O
Low	O
volume	O
and	O
prototyping	O
4	O
Pure-play	O
Microfluidic	O
Foundry	B-Algorithm
BioMEMS	O
design	O
and	O
manufacturing	O
Silicon	O
,	O
Glass	O
,	O
SU8/PDMS	O
,	O
Polymer	O
R&D	O
,	O
Mini	O
volume	O
production	O
IDM	O
nanoPHAB	O
Micro	O
-	O
and	O
Nano-fabrication	O
services	O
,	O
nano-MEMS	O
manufacturing	O
,	O
ASIC	O
III-V	O
materials	O
,	O
GaAs	O
,	O
InP	O
,	O
Si	O
,	O
Oxi-Nitrides	O
,	O
Glass	O
,	O
Polymers	O
,	O
Multimaterials	O
Epi-growth	O
,	O
Prototyping	O
and	O
Consultancy	O
.	O
</s>
<s>
Specialize	O
in	O
MEMS	B-Architecture
,	O
microfluidics	O
,	O
silicon	O
photonics	O
,	O
TSV	O
,	O
CMOS	O
integration	O
,	O
and	O
other	O
emerging	O
technologies	O
.	O
</s>
<s>
Proof	O
of	O
concept	O
,	O
process	O
development	O
,	O
prototyping	O
,	O
low	O
to	O
mid	O
volume	O
2	O
,	O
3	O
,	O
4	O
,	O
and	O
6	O
IDM	O
NEMS	O
and	O
MEMS	B-Architecture
Proto	O
Fab	B-Algorithm
(	O
NMPF	O
)	O
MEMS	B-Architecture
manufacturing	O
,	O
microfabrication	O
services	O
Silicon	O
,	O
Glass	O
,	O
Quartz	O
,	O
SOI	O
wafers	O
Low	O
to	O
medium	O
volume	O
and	O
prototyping	O
2	O
,	O
4	O
Pure	O
play	O
Philips	O
Customized	O
MEMS	B-Architecture
and	O
Micro	O
Assembly	O
,	O
process	O
design	O
and	O
manufacturing	O
,	O
certified	O
for	O
medical	O
devices	O
Silicon	O
,	O
SOI	O
,	O
glass	O
,	O
quartz	O
and	O
CMOS-wafers	O
.	O
</s>
<s>
Prototyping	O
,	O
low	O
and	O
medium	O
volume	O
production	O
6	O
,	O
8	O
Pure-play	O
Robert	O
Bosch	O
GmbH	O
Customized	O
MEMS	B-Architecture
process	O
development	O
and	O
manufacturing	O
.	O
</s>
<s>
Optional	O
:	O
design	O
,	O
assembly	O
,	O
test	O
,	O
integration	O
Silicon	O
,	O
SOI	O
,	O
Fused	O
silica	O
or	O
glass	O
,	O
post-processing	O
on	O
200mm-CMOS	O
wafers	O
Prototyping	O
,	O
development	O
,	O
medium	O
and	O
high	O
volume	O
8	O
IDM	O
Safran	O
Sensing	O
Technologies	O
MEMS	B-Architecture
Manufacturing	O
Silicon	O
,	O
SOI	O
Medium	O
volume	O
production	O
6	O
IDM	O
Semefab	O
MEMS	B-Architecture
manufacturing	O
High	O
volume	O
production	O
4	O
,	O
6	O
Pure-play	O
Semi-Conductor	O
Laboratory	O
CMOS	O
&	O
MEMS	B-Architecture
design	O
,	O
manufacturing	O
and	O
packaging	O
;	O
microfabrication	O
Silicon	O
,	O
SOI	O
and	O
various	O
glasses	O
From	O
Low	O
volume	O
production	O
6	O
,	O
8	O
Research	O
Institute	O
Silex	O
Microsystems	O
MEMS	B-Architecture
process	O
development	O
and	O
manufacturing	O
Silicon	O
,	O
SOI	O
,	O
Glass	O
Prototyping	O
and	O
high	O
volume	O
production	O
8	O
Pure-play	O
SINTEF	O
MiNaLab	O
Customized	O
MEMS	B-Architecture
,	O
BioMEMS	O
,	O
piezoMEMS	O
and	O
Micro-optics	O
.	O
</s>
