<s>
Laser	B-Algorithm
chemical	I-Algorithm
vapor	I-Algorithm
deposition	I-Algorithm
(	O
LCVD	O
)	O
is	O
a	O
chemical	O
process	O
used	O
to	O
produce	O
high	O
purity	O
,	O
high	O
performance	O
films	O
,	O
fibers	O
,	O
and	O
mechanical	O
hardware	O
(	O
MEMS	O
)	O
.	O
</s>
<s>
It	O
is	O
a	O
form	O
of	O
chemical	B-Algorithm
vapor	I-Algorithm
deposition	I-Algorithm
in	O
which	O
a	O
laser	O
beam	O
is	O
used	O
to	O
locally	O
heat	O
the	O
semiconductor	O
substrate	B-Architecture
,	O
causing	O
the	O
vapor	O
deposition	O
chemical	O
reaction	O
to	O
proceed	O
faster	O
at	O
that	O
site	O
.	O
</s>
