<s>
The	O
High-Speed	B-Algorithm
SECS	I-Algorithm
Message	I-Algorithm
Services	I-Algorithm
(	O
HSMS	B-Algorithm
)	O
protocol	O
is	O
a	O
standard	O
transport	O
protocol	O
for	O
communication	O
between	O
production	O
equipment	O
and	O
factory	O
control	O
systems	O
in	O
semiconductor	O
factories	O
.	O
</s>
<s>
HSMS	B-Algorithm
defines	O
a	O
TCP/IP	B-Protocol
based	O
Ethernet	O
connection	O
and	O
is	O
intended	O
as	O
a	O
high	O
speed	O
alternative	O
to	O
the	O
serial	O
(	O
RS-232	O
based	O
)	O
SECS-I	O
protocol	O
.	O
</s>
<s>
HSMS	B-Algorithm
is	O
defined	O
in	O
the	O
SEMI	O
standard	O
E37	O
.	O
</s>
