<s>
Bow	B-Algorithm
and	I-Algorithm
warp	I-Algorithm
of	I-Algorithm
semiconductor	I-Algorithm
wafers	I-Algorithm
and	I-Algorithm
substrates	I-Algorithm
are	O
measures	O
of	O
the	O
flatness	O
of	O
wafers	B-Architecture
.	O
</s>
<s>
Bow	O
is	O
the	O
deviation	O
of	O
the	O
center	O
point	O
of	O
the	O
median	O
surface	O
of	O
a	O
free	O
,	O
un-clamped	O
wafer	B-Architecture
from	O
the	O
reference	O
plane	O
,	O
where	O
the	O
reference	O
plane	O
is	O
defined	O
by	O
.	O
</s>
<s>
Warp	O
is	O
the	O
difference	O
between	O
the	O
maximum	O
and	O
the	O
minimum	O
distances	O
of	O
the	O
median	O
surface	O
of	O
a	O
free	O
,	O
un-clamped	O
wafer	B-Architecture
from	O
the	O
reference	O
plane	O
defined	O
above	O
.	O
</s>
<s>
The	O
above	O
definitions	O
were	O
developed	O
for	O
capacitance	O
wafer	B-Architecture
thickness	O
gauges	O
such	O
as	O
ADE	O
9500	O
,	O
and	O
later	O
adopted	O
by	O
optical	O
gauges	O
.	O
</s>
<s>
They	O
were	O
withdrawn	O
without	O
replacement	O
but	O
are	O
still	O
widely	O
used	O
for	O
characterization	O
of	O
semiconductor	B-Architecture
wafers	I-Architecture
,	O
metal	O
and	O
glass	O
substrates	B-Architecture
for	O
MEMS	B-Architecture
devices	O
,	O
solar	O
cells	O
,	O
and	O
many	O
other	O
applications	O
.	O
</s>
