<s>
Beam	B-Algorithm
lead	I-Algorithm
technology	I-Algorithm
is	O
a	O
method	O
of	O
fabricating	B-Architecture
a	O
semiconductor	O
device	O
.	O
</s>
<s>
Its	O
original	O
application	O
was	O
to	O
high-frequency	B-Algorithm
silicon	O
switching	O
transistors	B-Application
and	O
high-speed	O
integrated	O
circuits	O
.	O
</s>
<s>
It	O
eliminated	O
the	O
labor-intensive	O
wire-bonding	O
process	O
used	O
for	O
integrated	O
circuits	O
at	O
the	O
time	O
and	O
allowed	O
automated	O
assembly	O
of	O
semiconductor	O
chips	O
onto	O
larger	O
substrates	B-Architecture
to	O
produce	O
hybrid	O
integrated	O
circuits	O
.	O
</s>
<s>
Lepselter	O
developed	O
the	O
techniques	O
for	O
fabricating	B-Architecture
a	O
structure	O
consisting	O
of	O
electroforming	O
an	O
array	O
of	O
thick	O
,	O
self-supporting	O
gold	O
patterns	O
on	O
a	O
thin	O
film	O
Ti-Pt-Au	O
base	O
,	O
hence	O
the	O
name	O
"	O
beams	O
"	O
,	O
deposited	O
on	O
the	O
surface	O
of	O
a	O
silicon	B-Architecture
wafer	I-Architecture
.	O
</s>
<s>
The	O
excess	O
semiconductor	O
from	O
under	O
the	O
beams	O
was	O
removed	O
,	O
thereby	O
separating	O
the	O
individual	O
devices	O
and	O
leaving	O
them	O
with	O
self-supporting	O
beam	B-Algorithm
leads	I-Algorithm
or	O
internal	O
chiplets	O
cantilevered	O
beyond	O
the	O
semiconductor	O
.	O
</s>
<s>
This	O
technology	O
,	O
also	O
known	O
as	O
air-bridge	O
technology	O
,	O
has	O
established	O
itself	O
for	O
its	O
unsurpassed	O
reliability	O
in	O
high-frequency	B-Algorithm
silicon	O
switching	O
transistors	B-Application
and	O
ultra-high-speed	O
integrated	O
circuits	O
for	O
telecommunications	O
and	O
missile	O
systems	O
.	O
</s>
<s>
The	O
beam	B-Algorithm
lead	I-Algorithm
devices	O
,	O
produced	O
by	O
the	O
hundreds	O
of	O
millions	O
,	O
became	O
the	O
first	O
example	O
of	O
a	O
commercial	O
microelectromechanical	O
structure	O
(	O
MEMS	B-Architecture
)	O
.	O
</s>
