<s>
Atomic	B-Algorithm
Terrace	I-Algorithm
Low	I-Algorithm
Angle	I-Algorithm
Shadowing	I-Algorithm
(	O
ATLAS	O
)	O
is	O
a	O
surface	O
science	O
technique	O
which	O
enables	O
the	O
growth	O
of	O
planar	O
nanowire	B-Architecture
or	O
nanodot	O
arrays	O
using	O
molecular	B-Algorithm
beam	I-Algorithm
epitaxy	I-Algorithm
on	O
a	O
vicinal	O
surface	O
.	O
</s>
<s>
ATLAS	O
has	O
been	O
shown	O
to	O
be	O
a	O
very	O
versatile	O
technique	O
,	O
with	O
the	O
growth	O
of	O
metallic	O
,	O
semi-conducting	O
and	O
magnetic	O
nanowires	B-Architecture
and	O
nanodots	O
demonstrated	O
using	O
a	O
variety	O
of	O
source	O
materials	O
and	O
substrates	O
.	O
</s>
<s>
In	O
order	O
to	O
grow	O
nanowires	B-Architecture
with	O
a	O
width	O
of	O
fifteen	O
nanometers	O
or	O
less	O
,	O
the	O
deposition	O
temperature	O
for	O
both	O
orientations	O
should	O
be	O
chosen	O
such	O
that	O
the	O
mean	B-Algorithm
free	I-Algorithm
path	I-Algorithm
of	O
the	O
adatoms	O
on	O
the	O
surface	O
is	O
limited	O
to	O
a	O
few	O
nanometers	O
.	O
</s>
<s>
The	O
capabilities	O
of	O
the	O
system	O
were	O
first	O
tested	O
by	O
growing	O
arrays	O
of	O
10-30nm	O
wide	O
metallic	O
nanowires	B-Architecture
on	O
two	O
types	O
of	O
vicinal	O
substrates	O
,	O
step-bunched	O
Si(111 )	O
and	O
α-Al2O3(0001 )	O
.	O
</s>
<s>
Since	O
its	O
introduction	O
in	O
2008	O
,	O
ATLAS	O
has	O
been	O
demonstrated	O
as	O
a	O
simple	O
technique	O
to	O
produce	O
nanowires	B-Architecture
of	O
a	O
variety	O
of	O
materials	O
down	O
to	O
a	O
width	O
of	O
15nm	O
and	O
thickness	O
of	O
2nm	O
,	O
on	O
several	O
stepped	O
substrates	O
.	O
</s>
<s>
The	O
initial	O
growth	O
of	O
the	O
nanowires	B-Architecture
is	O
nucleated	B-Algorithm
on	O
certain	O
preferential	O
adsorption	O
sites	O
.	O
</s>
<s>
It	O
is	O
an	O
ongoing	O
topic	O
of	O
research	O
to	O
increase	O
the	O
quality	O
of	O
nanowires	B-Architecture
by	O
lattice	O
matching	O
,	O
or	O
increasing	O
initial	O
mobility	O
through	O
heating	O
of	O
the	O
substrate	O
.	O
</s>
