<s>
The	O
14	B-Algorithm
nm	I-Algorithm
process	I-Algorithm
refers	O
to	O
the	O
MOSFET	B-Architecture
technology	O
node	O
that	O
is	O
the	O
successor	O
to	O
the	O
22nm	B-Algorithm
(	O
or	O
20nm	O
)	O
node	O
.	O
</s>
<s>
The	O
14nm	B-Algorithm
was	O
so	O
named	O
by	O
the	O
International	O
Technology	O
Roadmap	O
for	O
Semiconductors	O
(	O
ITRS	O
)	O
.	O
</s>
<s>
Until	O
about	O
2011	O
,	O
the	O
node	O
following	O
22nm	B-Algorithm
was	O
expected	O
to	O
be	O
16nm	O
.	O
</s>
<s>
All	O
14nm	B-Algorithm
nodes	O
use	O
FinFET	O
(	O
fin	O
field-effect	O
transistor	O
)	O
technology	O
,	O
a	O
type	O
of	O
multi-gate	B-Algorithm
MOSFET	I-Algorithm
technology	O
that	O
is	O
a	O
non-planar	O
evolution	O
of	O
planar	O
silicon	O
CMOS	B-Device
technology	O
.	O
</s>
<s>
Samsung	B-Application
Electronics	O
taped	O
out	O
a	O
14nm	B-Algorithm
chip	O
in	O
2014	O
,	O
before	O
manufacturing	O
10	B-Algorithm
nm	I-Algorithm
class	I-Algorithm
NAND	O
flash	O
chips	O
in	O
2013	O
.	O
</s>
<s>
The	O
following	O
year	O
,	O
Intel	O
began	O
shipping	O
14nm	B-Algorithm
scale	O
devices	O
to	O
consumers	O
.	O
</s>
<s>
14nm	B-Algorithm
resolution	O
is	O
difficult	O
to	O
achieve	O
in	O
a	O
polymeric	O
resist	O
,	O
even	O
with	O
electron	B-Architecture
beam	I-Architecture
lithography	I-Architecture
.	O
</s>
<s>
In	O
addition	O
,	O
the	O
chemical	O
effects	O
of	O
ionizing	O
radiation	O
also	O
limit	O
reliable	O
resolution	O
to	O
about	O
30	B-Algorithm
nm	I-Algorithm
,	O
which	O
is	O
also	O
achievable	O
using	O
current	O
state-of-the-art	O
immersion	B-Algorithm
lithography	I-Algorithm
.	O
</s>
<s>
Hardmask	B-Algorithm
materials	O
and	O
multiple	B-Algorithm
patterning	I-Algorithm
are	O
required	O
.	O
</s>
<s>
A	O
more	O
significant	O
limitation	O
comes	O
from	O
plasma	O
damage	O
to	O
low-k	B-Algorithm
materials	O
.	O
</s>
<s>
The	O
damage	O
sensitivity	O
is	O
expected	O
to	O
get	O
worse	O
as	O
the	O
low-k	B-Algorithm
materials	O
become	O
more	O
porous	O
.	O
</s>
<s>
Tela	O
Innovations	O
and	O
Sequoia	O
Design	O
Systems	O
developed	O
a	O
methodology	O
allowing	O
double	O
exposure	O
for	O
the	O
16/14nm	O
node	O
circa	O
2010	O
.	O
</s>
<s>
Samsung	B-Application
and	O
Synopsys	O
have	O
also	O
begun	O
implementing	O
double	B-Algorithm
patterning	I-Algorithm
in	O
22nm	B-Algorithm
and	O
16nm	O
design	O
flows	O
.	O
</s>
<s>
On	O
January	O
17	O
,	O
2011	O
,	O
IBM	O
announced	O
that	O
they	O
were	O
teaming	O
up	O
with	O
ARM	O
to	O
develop	O
14nm	B-Algorithm
chip	O
processing	O
technology	O
.	O
</s>
<s>
On	O
February	O
18	O
,	O
2011	O
,	O
Intel	O
announced	O
that	O
it	O
would	O
construct	O
a	O
new	O
$5	O
billion	O
semiconductor	B-Algorithm
fabrication	I-Algorithm
plant	I-Algorithm
in	O
Arizona	O
,	O
designed	O
to	O
manufacture	O
chips	O
using	O
the	O
14nm	B-Algorithm
manufacturing	B-Architecture
processes	I-Architecture
and	O
leading-edge	O
300mm	O
wafers	B-Architecture
.	O
</s>
<s>
The	O
new	O
fabrication	B-Algorithm
plant	I-Algorithm
was	O
to	O
be	O
named	O
Fab	B-Algorithm
42	O
,	O
and	O
construction	O
was	O
meant	O
to	O
start	O
in	O
the	O
middle	O
of	O
2011	O
.	O
</s>
<s>
On	O
May	O
17	O
,	O
2011	O
,	O
Intel	O
announced	O
a	O
roadmap	O
for	O
2014	O
that	O
included	O
14nm	B-Algorithm
transistors	O
for	O
their	O
Xeon	B-Device
,	O
Core	B-Device
,	O
and	O
Atom	B-Device
product	O
lines	O
.	O
</s>
<s>
In	O
2002	O
,	O
an	O
international	O
team	O
of	O
researchers	O
at	O
UC	O
Berkeley	O
,	O
including	O
Shibly	O
Ahmed	O
(	O
Bangladeshi	O
)	O
,	O
Scott	O
Bell	O
,	O
Cyrus	O
Tabery	O
(	O
Iranian	O
)	O
,	O
Jeffrey	O
Bokor	O
,	O
David	O
Kyser	O
,	O
Chenming	O
Hu	O
(	O
Taiwan	O
Semiconductor	B-Architecture
Manufacturing	I-Architecture
Company	O
)	O
,	O
and	O
Tsu-Jae	O
King	O
Liu	O
,	O
demonstrated	O
FinFET	O
devices	O
down	O
to	O
10	O
nm	O
gate	O
length	O
.	O
</s>
<s>
In	O
2005	O
,	O
Toshiba	O
demonstrated	O
a	O
15nm	O
FinFET	O
process	O
,	O
with	O
a	O
15nm	O
gate	O
length	O
and	O
10nm	B-Algorithm
fin	O
width	O
,	O
using	O
a	O
sidewall	O
spacer	O
process	O
.	O
</s>
<s>
In	O
December	O
2009	O
,	O
National	O
Nano	O
Device	O
Laboratories	O
,	O
owned	O
by	O
the	O
Taiwanese	O
government	O
,	O
produced	O
a	O
16nm	O
SRAM	B-Architecture
chip	O
.	O
</s>
<s>
In	O
December	O
2012	O
,	O
Samsung	B-Application
Electronics	O
taped	O
out	O
a	O
14nm	B-Algorithm
chip	O
.	O
</s>
<s>
In	O
September	O
2013	O
,	O
Intel	O
demonstrated	O
an	O
Ultrabook	B-Device
laptop	O
that	O
used	O
a	O
14nm	B-Algorithm
Broadwell	B-General_Concept
CPU	I-General_Concept
,	O
and	O
Intel	O
CEO	O
Brian	O
Krzanich	O
said	O
,	O
"[CPU]	O
will	O
be	O
shipping	O
by	O
the	O
end	O
of	O
this	O
year.	O
"	O
</s>
<s>
In	O
August	O
2014	O
,	O
Intel	O
announced	O
details	O
of	O
the	O
14nm	B-Algorithm
microarchitecture	O
for	O
its	O
upcoming	O
Core	B-Device
M	I-Device
processors	O
,	O
the	O
first	O
product	O
to	O
be	O
manufactured	O
on	O
Intel	O
's	O
14nm	B-Algorithm
manufacturing	O
process	O
.	O
</s>
<s>
The	O
first	O
systems	O
based	O
on	O
the	O
Core	B-Device
M	I-Device
processor	O
were	O
to	O
become	O
available	O
in	O
Q4	O
2014	O
—	O
according	O
to	O
the	O
press	O
release	O
.	O
</s>
<s>
"	O
Intel	O
's	O
14	B-Algorithm
nanometer	I-Algorithm
technology	O
uses	O
second-generation	O
tri-gate	O
transistors	O
to	O
deliver	O
industry-leading	O
performance	O
,	O
power	O
,	O
density	O
and	O
cost	O
per	O
transistor	O
,	O
"	O
said	O
Mark	O
Bohr	O
,	O
Intel	O
senior	O
fellow	O
,	O
Technology	O
and	O
Manufacturing	O
Group	O
,	O
and	O
director	O
,	O
Process	O
Architecture	O
and	O
Integration	O
.	O
</s>
<s>
In	O
2018	O
a	O
shortage	O
of	O
14nm	B-Algorithm
fab	B-Algorithm
capacity	O
was	O
announced	O
by	O
Intel	O
.	O
</s>
<s>
In	O
2013	O
,	O
SK	O
Hynix	O
began	O
mass-production	O
of	O
16nm	O
NAND	O
flash	O
,	O
TSMC	O
began	O
16nm	O
FinFET	O
production	O
,	O
and	O
Samsung	B-Application
began	O
10nm	B-Algorithm
class	O
NAND	O
flash	O
production	O
.	O
</s>
<s>
On	O
September	O
5	O
,	O
2014	O
,	O
Intel	O
launched	O
the	O
first	O
three	O
Broadwell-based	O
processors	O
that	O
belonged	O
to	O
the	O
low-TDP	B-General_Concept
Core	B-Device
M	I-Device
family	O
:	O
Core	O
M-5Y10	O
,	O
Core	O
M-5Y10a	O
,	O
and	O
Core	O
M-5Y70	O
.	O
</s>
<s>
In	O
February	O
2015	O
,	O
Samsung	B-Application
announced	O
that	O
their	O
flagship	O
smartphones	O
,	O
the	O
Galaxy	B-Application
S6	I-Application
and	I-Application
S6	I-Application
Edge	I-Application
,	O
would	O
feature	O
14nm	B-Algorithm
Exynos	O
systems	B-Architecture
on	I-Architecture
chip	I-Architecture
(	O
SoCs	O
)	O
.	O
</s>
<s>
On	O
March	O
9	O
,	O
2015	O
,	O
Apple	O
Inc	O
.	O
released	O
the	O
"	O
Early	O
2015	O
"	O
MacBook	B-Device
and	O
MacBook	B-Device
Pro	I-Device
,	O
which	O
utilized	O
14nm	B-Algorithm
Intel	O
processors	O
.	O
</s>
<s>
Of	O
note	O
is	O
the	O
i7-5557U	O
,	O
which	O
has	O
Intel	B-Application
Iris	I-Application
Graphics	I-Application
6100	O
and	O
two	O
cores	O
running	O
at	O
3.1GHz	O
,	O
using	O
only	O
28	O
watts	O
.	O
</s>
<s>
On	O
September	O
25	O
,	O
2015	O
,	O
Apple	O
Inc	O
.	O
released	O
the	O
iPhone	B-Operating_System
6S	I-Operating_System
&	I-Operating_System
6S	I-Operating_System
Plus	I-Operating_System
,	O
which	O
are	O
equipped	O
with	O
"	O
desktop-class	O
"	O
A9	O
chips	O
that	O
are	O
fabricated	O
in	O
both	O
14nm	B-Algorithm
by	O
Samsung	B-Application
and	O
16nm	O
by	O
TSMC	O
(	O
Taiwan	O
Semiconductor	B-Architecture
Manufacturing	I-Architecture
Company	O
)	O
.	O
</s>
<s>
In	O
May	O
2016	O
,	O
Nvidia	O
released	O
its	O
GeForce	B-Device
10	I-Device
series	I-Device
GPUs	B-Architecture
based	O
on	O
the	O
Pascal	B-General_Concept
architecture	O
,	O
which	O
incorporates	O
TSMC	O
's	O
16nm	O
FinFET	O
technology	O
and	O
Samsung	B-Application
's	O
14nm	B-Algorithm
FinFET	O
technology	O
.	O
</s>
<s>
In	O
June	O
2016	O
,	O
AMD	O
released	O
its	O
Radeon	B-Device
RX	I-Device
400	I-Device
GPUs	B-Architecture
based	O
on	O
the	O
Polaris	O
architecture	O
,	O
which	O
incorporates	O
14nm	B-Algorithm
FinFET	O
technology	O
from	O
Samsung	B-Application
.	O
</s>
<s>
On	O
March	O
2	O
,	O
2017	O
,	O
AMD	O
released	O
its	O
Ryzen	O
CPUs	O
based	O
on	O
the	O
Zen	O
architecture	O
,	O
incorporating	O
14nm	B-Algorithm
FinFET	O
technology	O
from	O
Samsung	B-Application
which	O
was	O
licensed	O
to	O
GlobalFoundries	O
for	O
GlobalFoundries	O
to	O
build	O
.	O
</s>
<s>
The	O
NEC	B-Device
SX-Aurora	I-Device
TSUBASA	I-Device
processor	O
,	O
introduced	O
in	O
October	O
2017	O
,	O
uses	O
a	O
16nm	O
FinFET	O
process	O
from	O
TSMC	O
and	O
is	O
designed	O
for	O
use	O
with	O
NEC	B-Device
SX	I-Device
supercomputers	O
.	O
</s>
<s>
On	O
July	O
22	O
,	O
2018	O
,	O
GlobalFoundries	O
announced	O
their	O
12nm	O
Leading-Performance	O
(	O
12LP	O
)	O
process	O
,	O
based	O
on	O
a	O
licensed	O
14LP	O
process	O
from	O
Samsung	B-Application
.	O
</s>
<s>
In	O
September	O
2018	O
Nvidia	O
released	O
GPUs	B-Architecture
based	O
on	O
their	O
Turing	O
(	O
microarchitecture	O
)	O
,	O
which	O
were	O
made	O
on	O
TSMC	O
's	O
12nm	O
process	O
and	O
have	O
a	O
transistor	O
density	O
of	O
24.67	O
million	O
transistors	O
per	O
square	O
millimeter	O
.	O
</s>
<s>
ITRS	O
Logic	O
DeviceGround	O
Rules	O
(	O
2015	O
)	O
Samsung	B-Application
TSMC	O
Intel	O
GlobalFoundries	O
SMIC	O
Process	O
name	O
16/14	O
nm	O
14/11	O
nm	O
16(16 nm )	O
16(16 nm )	O
16(16 nm )	O
12(12 nm )	O
14	B-Algorithm
nm	I-Algorithm
14(14 nm )	O
12(12 nm )	O
14	B-Algorithm
nm	I-Algorithm
Transistor	O
density	O
(	O
MTr/mm2	O
)	O
32.94	O
(	O
14	B-Algorithm
nm	I-Algorithm
)	O
<	O
br/	O
>54.38	O
(	O
11	O
nm	O
)	O
28.88	O
33.8	O
37.5	O
30.59	O
36.71	O
30	O
Transistor	O
gate	O
pitch	O
(	O
nm	O
)	O
70	O
78	O
14LPE	O
(	O
HD	O
)	O
78	O
14LPP	O
(	O
HD	O
)	O
84	O
14LPP	O
(	O
UHP	O
)	O
84	O
14LPP	O
(	O
HP	O
)	O
78	O
11LPP	O
(	O
UHD	O
)	O
88	O
70	O
(	O
14	B-Algorithm
nm	I-Algorithm
)	O
70	O
(	O
14	B-Algorithm
nm	I-Algorithm
+	O
)	O
84	O
(	O
14	B-Algorithm
nm	I-Algorithm
++	O
)	O
84	O
?	O
</s>
