Koukharenko, E, Li, X, Nandhakumar, I, Schiedt, B, Trautmann, C, Speed, J, Tudor, MJ, Beeby, SP and White, NM
Development of nanostructures for thermoelectric microgenerators using ion-track lithography.
ELECTRONICS LETTERS, 44, .
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A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon micro-fabrication techniques, electroplating and submicron ion-track nanolithography, is discussed. Ion-track etched polyimide nanotemplates (30-80 nm pore diameters) are used to grow Bi2Te3 nanowires by electroplating. The Bi2Te3 film's microstructural and thermoelectric properties are reported.
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