- Diffraction pattern of triangular grating in the resonance domainTetsuya Hoshino
Institute of Applied Physics, University of Tsukuba, Tsukuba, Japan
J Opt Soc Am A Opt Image Sci Vis 26:715-22. 2009....
- Precise and rapid distance measurements by scatterometryTetsuya Hoshino
Institute of Applied Physics, University of Tsukuba, 1 1 1 Tennoudai, Tsukuba 305 8577, Japan
Opt Express 20:3954-66. 2012..We used rigorous coupled-wave analysis to calculate the diffraction intensity. Some of the results were verified by nonstandard finite-difference time-domain simulations and experiments...