Selvarajan, Ananth and Anand, SK (1999) Noise analysis and a comparative study of noise in MEMS and MOEMS. In: SPIE:Smart Structures and Materials 1999: Smart Electronics and MEMS, 1-3 March 1999, Newport Beach, CA, USA, Vol.3673, 113-120.Full text not available from this repository. (Request a copy)
In recent years Micro Electro Mechanical Systems (MEMS) and Micro Opto Electro Mechanical Systems (MOEMS) have grown in importance, especially in smart structure applications. In this paper a theoretical comparative study is made analyzing three different types of micro pressure sensors. MEMS type pressure sensors of the piezo-resistive and capacitive type are considered along with MOEM pressure sensor of the Fabry-Perot interferometric type. It is found that piezo resistive and capacitive pressure sensors in the micro form attain improved noise performance as compared to their bulk counterparts. The opto-mechanical sensors shows better noise performance than the capacitive sensor, when the limiting noise is due to Brownian motion.
|Item Type:||Conference Paper|
|Additional Information:||Copyright of this article belongs to SPIE - International Society for Optical Engineering.|
|Department/Centre:||Division of Electrical Sciences > Electrical Communication Engineering|
|Date Deposited:||28 May 2007|
|Last Modified:||27 Aug 2008 12:43|
Actions (login required)