|Publication number||US6392752 B1|
|Application number||US 09/591,723|
|Publication date||May 21, 2002|
|Filing date||Jun 12, 2000|
|Priority date||Jun 14, 1999|
|Publication number||09591723, 591723, US 6392752 B1, US 6392752B1, US-B1-6392752, US6392752 B1, US6392752B1|
|Inventors||Kenneth Carlisle Johnson|
|Original Assignee||Kenneth Carlisle Johnson|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (2), Referenced by (63), Classifications (36), Legal Events (6)|
|External Links: USPTO, USPTO Assignment, Espacenet|
The following patent applications are hereby incorporated by reference in their entirety for all purposes:
“Microlens Scanner for Microlithography and Wide-Field Confocal Microscopy” (U.S. patent application Ser. No. 08/803,096, filed Feb. 20, 1997);
“Conformal Imaging Microlens Array” (Provisional Application 60/115,451, filed Jan. 11, 1999);
“Conformal Imaging Microlens Array with High Fill Factor” (Provisional Application 60/119,403, filed Feb. 1, 1999);
“Multi-Stage Microlens Array” (U.S. patent application Ser. No. 09/481,379 filed Jan. 11, 2000).
This application claims priority from the following provisional patent application, the disclosure of which is incorporated by reference:
“Phase-Measuring Microlens Array” (Provisional Application 60/139,002, filed Jun. 14, 1999).
Optical microscopes that provide phase-measuring capability are useful for resolving small surface height variations on an inspection sample and for distinguishing sample materials based on their reflectance phase properties. Examples of phase-sensitive microscopes are Mirau interference microscopes, Nomarski differential phase contrast microscopes, and heterodyne interference microscopes. In each of these microscopes, an illumination beam is separated into two beams by some type of beam-splitting mechanism; at least one of the beams is focused onto and reflects off an inspection sample; and the two beams are then coherently recombined by the beam-splitting mechanism and projected onto an optical detector. The phase relationship between the recombined beams affects the detector-plane beam intensity; thus the detector signal is sensitive to small path length differences or sample-induced phase differences between the two beams. Some systems are also provided with a phase-modulating mechanism that applies a controlled phase shift to the beams, and the signal is sampled at multiple phase shifts to enhance measurement sensitivity.
The beam-splitting mechanism in a Mirau-type microscope is a partially-reflecting mirror between the microscope objective and the sample. In this system one of the separated beams is focused onto the sample and the other is focused onto a small reference mirror proximate to the objective. A limitation of the Mirau microscope is that the phase relationship between the recombined beams depends on the sample's focus height and is hence very sensitive to vibration and focus drift.
The Nomarski microscope focuses both beams onto the sample so that focus shifts affect both beams equally and therefore have no effect on their relative phase. In this type of system the beam-splitting element is typically a Wollaston prism which induces a slight angular separation between two polarization components of a transmitted beam, and the polarization-separated beams are focused by a microscope objective onto two proximate points on the sample. A Nomarski microscope is sensitive to differences in surface height or reflectance phase between the two focus points.
A heterodyne interference microscope is similar to a Nomarski microscope, except that the beam-splitting mechanism is typically an acousto-optic diffraction grating rather than a polarization-separation device. The grating functions to separate an incident beam into two diffracted beams. It also functions to introduce a precisely controlled frequency difference between the separated beams (which is equivalent to a time-variable induced phase shift). This greatly enhances the system's phase-measuring capability.
Surface height variations can also be accurately measured by means of confocal microscopy, in which a pinhole-filtered beam is focused onto a sample and the reflected beam is filtered through the same pinhole and projected onto a detector. Typically, the focused beam is raster-scanned across the sample to synthesize a two-dimensional image, and the sample's focus height may also be scanned to form a three-dimensional surface profile image. Confocal microscopes do not commonly provide phase-measuring capability—their depth discrimination is based on their narrow depth of focus. However, confocal microscopy can be used in conjunction with phase-measuring methods to provide enhanced depth discrimination. Several confocal systems of this type are described in “Confocal Microscopy”, ed. T. Wilson, Academic Press, 1990.
Confocal systems that use a single scanning spot tend to be limited in their image acquisition speed. This limitation can be overcome by using multiple parallel-scanning spots (e.g., by using a Nipkow disk scanner) or a high-speed scanner (such as an acousto-optic scanner). However, a limitation of all of these methods is that their field size is limited by the microscope objective. A confocal system can only achieve high depth discrimination by using an objective of high numerical aperture, and such objectives generally have comparatively small field sizes.
High-resolution, high-speed confocal imaging over large image fields can be achieved by using a scanning microlens array. A system of this type is described in “Three-dimensional analysis by a microlens-array confocal arrangement”, by Hans J. Tiziani and Hans-Martin Uhde, Applied Optics Vol. 33, No. 4 (1994), pp. 567-572; and a similar system is disclosed in U.S. pat. application Ser. No. 08/803,096. However, these systems do not provide phase-measuring capability.
A scanning confocal microlens array can be adapted to provide phase-measuring capability by equipping each microlens with a beam-splitting mechanism that separates the illumination on the microlens into two beams, at least one of which is focused onto and reflects off an inspection sample. The two beams are coherently recombined by the beam-splitting mechanism and are projected onto an element of a detector array, wherein each detector element senses radiation from a particular corresponding microlens. The sample is scanned laterally across the focal point array to build up a synthesized, two-dimensional image of the sample surface. The sample's focus height may also be scanned to form a three-dimensional surface profile image. (Either the lateral or focus scanning, or both, may eqivalently be effected by moving the microlens array relative to the sample.)
The microlens array could also be equipped with a phase-modulating mechanism to provide enhanced phase-measuring capability, in a manner analogous to a confocal heterodyne microscope. However, the same objective can be more simply achieved by effectively using the scanning motion itself as the phase-modulating mechanism. In this mode of operation, each beam-splitting mechanism applies a fixed, built-in phase shift to the two separated beams, but the phase shift is not the same for all microlenses. Each object point on the sample is scanned by several microlenses that have different built-in phse shifts, and the detector signals acquired from the different scans are combine provide confocal image data over a range of phase shifts.
FIG. 1 schematically illustrates a confocal microlens microscopy system that can be adapted to provide phase-measuring capability.
FIG. 2 illustrates an embodiment of a phase-measuring microles array in which each microlens operates as a miniature Mirau interference microscope.
FIG. 3 illustrates an embodiment of a phase-measuring microles array in which each microlens operates in a manner analogous to a miniature Nomarski microscope.
FIG. 4 shows a sectional view of two single-level, binary-optics devices - a diffraction grating and a diffractive microlens.
FIG. 5 shows a plan view of a binary-optic diffraction grating.
FIG. 6 shows a plan view of a binary-optic, diffractive microlens.
FIG. 7 shows a plan view of a binary optic element that combines the grating a lens functions.
FIG. 1 schematically illustrates a confocal microlens microscopy system that can be adapted to provide phase-measuring capability. (This is similar to FIG. 1 in U.S. pat. application Ser. No. 08/803,096. The system's phase-measuring features are not shown, but will be described below.) The system contains a low-resolution, double-telecentric optical projection system 101 which images a microlens array 102 onto an optical detector array 103. The microlens array comprises microlens elements, each of which is imaged onto a corresponding detector pixel element. For example, microlens elements L1, L2, L3, etc. are imaged onto respective pixels D1, D2, D3, etc. Each microlens collects radiation from a corresponding spot on or close to an inspection sample 106 (e.g., point p1, p2, or p3, etc.) and focuses it onto an aperture stop 107 (the “projection aperture”) in projection system 101. Thus the corresponding detector pixel senses the sample reflectivity over a very small spot on surface 106. For example, microlens L2 focuses radiation from corresponding focal point p2 onto the aperture 107, so pixel D2 senses the reflectivity at p2. The sample is illuminated in reflection mode from an illumination system 109, using a beam splitter 110 to merge the illumination into the light path. As the detector signal is acquired, a scanning mechanism 111 scans the sample 106 to build up a synthesized, high-resolution image.
The FIG. 1 schematic represents only one of a variety of optical configurations in which the phase measurement method can be applied. For example, FIG. 21b in U.S. pat. application Ser. No. 08/803,096 illustrates a microlens imaging system in which the projection system comprises reflective imaging optics and a reflective projection aperture, and the microlens array in this system could be configured to provide phase-measuring capability as described below.
FIG. 2 illustrates an embodiment of a phase-measuring microles array 102 in which each microlens operates as a miniature Mirau interference microscope. The array comprises microlenses L0, L1, L2, L3, etc. which are positioned proximate to inspection surface 106, and which preferably have a common focal length F and common focal plane 201. The surface height relative to the focal plane is denoted z. The microlenses are illustrated as continuous-profile lens elements in FIG. 1, but they could alternatively have other forms such as Fresnel lenses or binary optic diffractive lenses. At least some of the microlenses Lj (j=1, 2, 3 . . . ) are provided with corresponding partially-reflecting beam-splitter films BSj and small reference mirrors Mj proximate to the microlenses. The height of BSj above focal plane 201 is denoted hj and the height of Mj above BSj is also preferably equal to hj. Incident illumination is focused by each microlens Lj and is separated into two beams by BSj. The beam that transmits through BSj is focused to a point pj and is reflected by inspection surface 106; the beam reflected by BSj is focused to a point p′j on Mj and is reflected by Mj; and the two beams are then recombined by BSj and pass back through Lj, and are detected by a corresponding detector pixel.
The beam splitter BSj or mirror Mj could be vibrated or moved to modulate the phase relationship between the two combined beams, but a simpler, preferred method of achieving phase modulation is to scan the inspection surface under a row of microlenses which have fixed beam splitters and mirrors, but which have different height parameters hj. The detector signals obtained from consecutive microlenses at a particular measurement point on the inspection surface can be combined to effectively synthesize signals that would be obtained from a single microlens with a varying hj parameter.
The microlenses may function as components of a confocal microscope such as that illustrated in FIG. 1. The system may contain some microlenses, such as element L0, that do not have associated beam splitter and reference mirror elements. These elements would be used to detect focus height z. (By definition, the focus height on element L0's optical axis is zero at the focus position where the confocal intensity response from L0 is maximum.)
The projection aperture 107 (FIG. 1) is conjugate to the microlens focal points pj and filters out stray light from sources such as multiple reflections between the beam splitters and the inspection surface. Assuming that such sources are adequately filtered out (either by the projection aperture or by other means), the measured return beam intensity Ij[z] from lens Lj, at focus position z, will have the form
wherein j=1, 2, 3 . . . , r is the inspection surface's complex reflectance at point pj, and φ is the phase of r,
[Technically, the surface cannot be characterized by unique reflectance factor r because the reflectance is a function of incidence angle. Furthermore, in an out-of-focus condition focal point pj is not exactly at the surface and the beam may cover a non-negligible surface area. Nevertheless, the surface could be characterized in terms of a unique “effective reflectance coefficient” r that depends on the confocal optics configuration as well as the surface reflectance properties.] Φj[z] is a phase factor that depends on the focus position z and beam splitter height hj; a[z] and b[z] are functions of z; and I(0) is the beam intensity that would be obtained with the inspection surface absent (i.e. with r=0). a[z], b[z], and I(0) are assumed to be the same for all microlenses. (This condition can be easily verified for I(0) by measuring Ij[z] with the inspection surface absent.)
The terms a[z], b[z], and Φj[z] in Eq 1 are stable characteristics of the optical components, but the I(0) factor is proportional to the incident beam intensity and can therefore vary with time due to instability of the illumination source. Thus, in a typical measurement process Eq 1 contains three unknowns: |r|, φ, and I(0), which can be determined from three intensity measurements I1[z], I2[z], and I3[z] obtained from three microlenses L1, L2, and L3 having different beam splitter heights h1, h2, and h3. The terms a[z], b[z], and Φj[z], which must be known in the measurement process, can be determined by a calibration procedure in which I1[z], I2[z], and I3[z] are measured on each of 4 calibration samples, one of whose complex reflectance r is known. The total number of measured quantities in the calibration process is 12, from which 12 unknowns can be determined. The unknowns are I(0), a[z], b[z], Φ1[z], Φ2[z], Φ3[z], and the magnitude and phase of each of the three unknown reflectance factors. This procedure can be repeated at each of a range of focus positions z to calibrate the system over an extended focus range.
Rather than using a reference mirror to measure the inspection surface's complex reflectance, the system can alternatively be designed to use a proximate point on the surface itself as a reflectance reference (in a manner analogous to Nomarski microscopy). This configuration is illustrated schematically in FIG. 3. The microlens array 102 comprises microlenses L0, L1, L2, L3, etc. which are positioned proximate to inspection surface 106, and which preferably have a common focal length F and common focal plane 201. The surface height relative to the focal plane is denoted z. At least some of the microlenses Lj (j=1, 2, 3 . . . ) are provided with corresponding diffraction gratings Gj, each of which splits incident illumination into two diffracted orders that are focused by Lj to proximate points pj and p′j on the focal plane. The reflected beams then pass back through Lj, are recombined by Gj, and are detected by a corresponding detector pixel. The phase relationship of the combined beams could be modulated by laterally translating the grating element, but a simpler, preferred method of achieving phase modulation is to scan the inspection surface under a row of microlenses which have fixed gratings, but whose gratings have different positional relationships between the grating lines and the associated microlens aperture (FIG. 3). The detector signals obtained from consecutive microlenses at a particular pair of proximate measurement points (pj, p′j) can be combined to effectively synthesize signals that would be obtained from a single microlens with a varying grating position.
Typically, the grating Gj would be designed to extinguish the zero order, and the +1st and −1st diffracted orders would be focused to respective points pj and p′j. Apertures ap1, ap2, ap3, etc. may be used to block higher diffracted orders at the focal plane 201 (FIG. 3). In the return beam, the +1st diffracted order from pj and the −1st diffracted order from p′j are combined and directed onto a detector pixel. (Alternatively, the blocking apertures may be eliminated and more than two diffracted orders could be collected in the return beam, but in typical applications the detector signal would be dominated by the +1st and −1st orders.) The microlenses may function as components of a confocal microscope (FIG. 1) whose projection aperture (107) also functions to block higher diffracted orders in the return beam. Assuming that the higher diffracted orders are adequately filtered out in both the focused and return beams, the measured return beam intensity Ij[z] from lens Lj, at focus position z, will have the form
wherein r and r′ are the inspection surface's complex reflectances at points pj and p′j, respectively, and φ and φ′ are the respective phase angles of r and r′,
(If there is a step height offset between the surface regions at pj and p′j, then φ includes the phase shift due to the step height.) Φj[z] is a phase factor that depends on the focus position z and the lateral position of grating Gj; a[z] and b[z] are functions of z; and I(0) is the beam intensity that would be obtained with r=0 and r′=1. a[z], b[z], and I(0) are assumed to be the same for all microlenses. (This condition can be easily verified for I(0) and a[z] by measuring Ij[z] with a non-reflecting spot, such as a deep hole, positioned at point pj or p′j. Ij[z] values acquired at the spot with different microlenses, all at the same focus level z, should not differ significantly.) z is defined here as the focus height at point p′j (not pj) Microlenses such as element L0 that do not have associated gratings may be used to measure focus position by means of their confocal depth response. (The confocal response is maximum at z=0.)
The reflectance ratio r/r′ can be determined from three intensity measurements I1[z], I2[z], and I3[z] obtained from three microlenses L1, L2, and L3 whose associated gratings have different lateral positional offsets relative to their corresponding microlens apertures. This can be demonstrated by restating Eq 3 as follows,
Three such equations for I1[z], I2[z], and I3[z] can be combined to determine the three unknown subexpressions |r/r′|, (φ−φ′), and I0|r′|2 in Eq 5, from which r/r′ is obtained,
The terms a[z], b[z], and Φj[z] in Eq 5 can be obtained by a calibration procedure in which I1[z], I2[z], and I3[z] are measured with four different r values in combination with a single r′ value. There are 12 measured values, in total. One of the four r values is equal to r′, so the reflectance ratio r/r′ is known to be I for that case. The magnitudes and phases of the other three ratios define 6 unknowns which, together with the terms I0|r′|2, a[z], b[z], Φ1[z], Φ2[z], and Φ3[z], constitute 12 unknowns that can be determined from the 12 measurements.
In the FIG. 3 configuration each grating Gj (j=1,2,3 . . . ) is positioned in the back focal plane of the corresponding microlens Lj. This has the advantage that the reflected beams from points pj and p′j will be recombined at Gj without any lateral offset between the beam apertures, and thus the modulation contrast (i.e. the b[z] factor in Eq 3) will be maximized. However, if the separation between pj and p′j is much smaller than the beam aperture dimension on Lj, the grating could be positioned much closer to the microlens without significant loss of modulation contrast, and it could even be formed directly on the microlens surface. If the microlens is a binary optic element, its design could be easily modified to include the grating finction, as illustrated in FIGS. 4-7. FIG. 4 shows a sectional view of two single-level, binary-optics devices, a diffraction grating G1 and a diffractive microlens L1, in close proximity to each other. The etch step height s on each element's diffractive surface is preferably selected to provide a relative phase shift of π between portions of the beam transmitting through the two surface levels,
wherein λ is the operating wavelength, and n1 and n2 are the refractive indices on either side of the diffracting surface. Plan views of G1 and L1, showing the relative phase shift φ induced by the different surface levels, are illustrated in FIGS. 5 and 6. A single element combining both the grating and lens functions can be designed by adding the two phase functions modulo 2π. Each phase function has two levels, 0 and π (indicated in the figures by shaded and unshaded regions, respectively), so the sum would comprise three levels, 0, π, and 2π. However, the 2π phase shift can be replaced by a zero phase shift, so the modulo-2π sum will just comprise two phase levels, 0 and π. The composite element, denoted “G1,L1”, is illustrated in FIG. 7. Also, FIG. 7 illustrates two similar elements, “G2, L2” and “G3, L3”, each of which has a different lateral positional relationships between the grating lines and the associated microlens aperture. This design approach can also be applied to more general N-level binary optic designs. The phase levels in an N-level design are generally 0, 2π/N, 4π/N, . . . 2π (N−1)/N; and adding two such phase functions modulo-2π results in a composite phase function which also has the same N phase levels.
The invention can use a variety of microlens forms. The microlenses could comprise continuous-profile, grayscale-etched or molded refracting surfaces; or they could comprise Fresnel lenses, binary-optic diffractive lenses, or focusing elements of other types. In addition, the microlens elements could be provided with individual, MEMS-actuated focus controls as described in Provisional App. No. 60/115,451, and each microlens could also comprise two lens elements in series, in the configuration described in Provisional App. No. 60/119,403. (Similar variations are described in U.S. pat. application Ser. No. 09/481,379.) In the context of this disclosure the term “microlens” can optionally be construed as a compound lens comprising two or more lens elements, and “microlens array” can be construed as a multi-stage microlens array comprising two or more stages.
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|U.S. Classification||356/511, 356/516, 356/521|
|International Classification||G02B21/14, G03F9/00, G02B21/00, G03F7/20, G21K7/00, G02B5/18|
|Cooperative Classification||G03F7/704, G02B21/14, G02B5/1885, G21K7/00, G02B5/1876, G03F7/70033, G02B21/0056, G03F9/70, G02B21/0028, F25J2215/36, G02B21/0044, B82Y10/00, G03F7/70291, G02B21/004|
|European Classification||B82Y10/00, G03F7/70B6, G03F7/70F14B, G03F9/70, G03F7/70H2D, G02B21/00M4A5D, G02B21/00M4A5A, G02B21/00M4A1, G21K7/00, G02B21/14, G02B5/18Z, G02B21/00M4A7C, G02B5/18Z1A|
|Jul 22, 2003||CC||Certificate of correction|
|Nov 21, 2005||FPAY||Fee payment|
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|Oct 23, 2009||FPAY||Fee payment|
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|Dec 27, 2013||REMI||Maintenance fee reminder mailed|
|May 21, 2014||LAPS||Lapse for failure to pay maintenance fees|
|Jul 8, 2014||FP||Expired due to failure to pay maintenance fee|
Effective date: 20140521