PDMS face down in stsetch?
Alissa M. Fitzgerald
amf at amfitzgerald.com
Fri Apr 28 13:00:08 PDT 2006
We have some wafers with a layer of PDMS over patterned Al, over thermal oxide. We would like to backside etch these wafers using STSetch and stop on the thermal oxide.
Is it ok to put PDMS face down in the stsetch? Would we need to use the holder?
How hot does the chuck get? Are we likely to see resist burning because the PDMS is a thermal insulator?
Please let us know as soon as you can, we might want to try some experiments this weekend.
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