- Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser-plasma EUV sourcePrzemyslaw W Wachulak
Institute of Optoelectronics, Military University of Technology, 2 Kaliskiego Street, 00 908 Warsaw, Poland
Opt Lett 35:2337-9. 2010..The experiment and the spatial resolution measurements, based on a knife-edge test, are described. The results might be useful for the realization of a compact high-resolution tabletop imaging systems for actinic defect characterization...
- A 50 nm spatial resolution EUV imaging-resolution dependence on object thickness and illumination bandwidthPrzemyslaw W Wachulak
Institute of Optoelectronics, Military University of Technology, ul gen S Kaliskiego 2, 00 908 Warsaw, Poland
Opt Express 19:9541-50. 2011....