What does it take to transform a raw glass substrate into a perfect EUV mask blank? Over $200 million in investments by the industry and the State of New York, extensive partnerships with chipmakers, commercial mask blank suppliers, mask tool suppliers and mask shops, countless hours of R&D efforts by hundreds of dedicated technologists and engineers, and one results-driven research consortium that could bring it all together and make it happen: SEMATECH.
Researchers from SEMATECH and SCREEN Semiconductor Solutions Co. Ltd reveal the first 300 mm wafer-level demonstration of alternative doping using liquid phase monolayer doping (MLD) on III-V substrates.
Dr. Edward Barth, SEMATECH’s Director of Corporate Development, offers his thoughts on Dan Hutcheson’s recent comments about a rethinking of the oversimplification surrounding “More Moore” vs “More Than Moore.”
Metrology scientist PY Hung discusses how tip-enhanced Raman spectroscopy (TERS) is steadily advancing as a potential metrology technique for next-generation high-volume semiconductor manufacturing.