Semiconductor Manufacturing Equipment Reference Materials
Reference Articles 1 - 5 of 5
Air Showers- Increasing Productivity and Reducing Operating
From: Clean Air ProductsDescription: A cleanroom provides a controlled environment in which companies can produce contaminant-free products. Air showers are a vital component in maintaining that clean environment. They protect the ...
Local Plasma Treatment in a Mask Aligner for Selective Wafer Surface Modification (.pdf)
Description: Plasma pre-treatment for low-temperature direct wafer bonding is used worldwide in many different applications. In this process the full wafer surface is exposed to the plasma. Recently, a new process ...
Metal Based Wafer Bonding Techniques for Wafer Level Packaging (.pdf)
Description: Wafer level bonding utilizing metal based technologies are coming to the forefront of manufacturing methods in numerous 3D integration schemes and advanced MEMS processing. Copper to copper bonding of ...
UV Enhanced Substrate Conformal Imprint Lithography (UV-SCIL) Technique for Photonic Crystals Patterning in LED Manufacturing (.pdf)
Description: In this paper, a revolutionary NIL technique, SCIL, and the corresponding tooling solution on SUSS mask aligners has been introduced. The imprints of 2D holes array over 6 inch area in sol-gel and ...
The Role of Wafer Bonding in 3D Integration and Packaging (.pdf)
Description: There are numerous process integration schemes currently in place for the implementation of 3D-IC. Via first, via middle, via last along with back end of line (BEOL), front end of line (FEOL) and ...