Schematic representation of formation of the oxide-capped nanotips. (a) Original silicon nanotips. (b) A 30-nm-thick silicon oxide was thermally grown. (c) Photoresist was spin-coated and immersed into the stripper to expose the pinpoint of nanotips. (d) The oxide-capped nanotips were completed.
Wu et al. Nanoscale Research Letters 2012 7:120 doi:10.1186/1556-276X-7-120