Patent application title: MOS transistor on the basis of quantum interferance effect
Avto Tavkhelidze (Tbilisi, GE)
IPC8 Class: AH01L2906FI
Class name: Active solid-state devices (e.g., transistors, solid-state diodes) thin active physical layer which is (1) an active potential well layer thin enough to establish discrete quantum energy levels or (2) an active barrier layer thin enough to permit quantum mechanical tunneling or (3) an active layer thin enough to permit carrier transmission with substantially no scattering (e.g., superlattice quantum well, or ballistic transport device)
Publication date: 2009-03-19
Patent application number: 20090072219
A new type of Metal Oxide Semiconductor (MOS) transistor that works on the
basis of the Quantum Interference Depression (QID) effect is disclosed.
QID occurs inside an n-type semiconductor source-drain electrode of
special geometry. Due to QID the Fermi level of said semiconductor
increases locally inside the source drain electrode, thereby creating a
localised potential energy barrier in the path of electrons moving from
source to drain regions. The height of the barrier depends on the degree
of QID. QID is in turn regulated by the gate voltage via the charge
depletion and hence change in effective dimensions of the special
geometry of the semiconductor electrode. A gate voltage modulated
potential energy barrier and is thus formed whereby current in said MOS
transistor is controlled.
1. A quantum interference transistor comprising;(a) a semiconductor
substrate(b) a source region on said substrate(c) a drain region on said
substrate(d) a protrusion formed on the surface of said substrate,
wherein said protrusion is located between said source and drain
regions,(e) an insulating layer on said protrusion(f) a conducting layer
on said insulating layer(g) an external voltage applied between said
source and drain regions(h) an external voltage applied between said
semiconductor substrate and said conducting layer,whereby a current
between said source and drain regions is regulated by the application of
said external voltage between said semiconductor substrate and said
conducting layer by way of charge depletion and quantum interference
effects at the site of said protrusion.
2. The device of claim 1 wherein said conducting layer comprises a metal.
3. The device of claim 1 wherein said conducting layer comprises polycrystalline silicon.
4. The device of claim 1 wherein said source and drain regions comprise n-type source and drain regions.
5. The device of claim 1 wherein said source and drain regions comprise p-type source and drain regions and said semiconductor substrate comprises an n-type semiconductor.
6. The device of claim 1, wherein walls of said protrusion are substantially perpendicular to one another.
7. The device of claim 1, in which edges of said protrusion are substantially sharp.
8. The device of claim 1, wherein a depth of said protrusion ≧λ/2, wherein λ is the de Broglie wavelength.
9. The device of claim 1, wherein a depth of said protrusion is greater than the surface roughness of the semiconductor surface.
10. The device of claim 1, wherein a width of said protrusion >>λ, wherein λ is the de Broglie wavelength.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application claims the benefit of U.K. Patent Application No. GB0717976.5, filed Sep. 14, 2007, said document incorporated herein in its entirety by reference.
BACKGROUND OF THE INVENTION
Much research has been devoted in recent years to the development of quantum transistors. Proposed devices include the Aharonov-Bohm quantum phase transistor, quantum well transistor, quantum-tunneling transistor, and quantum diffraction transistor. It is an object of the present invention to provide a novel form of a MOS transistor based on a quantum interference effect.
A new low dimensional quantum effect (QID) was predicted theoretically and observed experimentally in solids. QID is based on electron de Broglie wave interference due to special geometry of a solid. Quantum interference causes some quantum states inside the solid to become forbidden, as a result of which the Fermi energy level increases. The magnitude of the change in the Fermi level depends on the exact dimensions of the special geometry of the solid. QID has been observed in a range of materials, including Au, Nb and SiO2.
Previously, it was known that quantum interference effects appeared because of a series of protrusions on the surface of a material. More recently it has been shown that quantum interference also occurs due to the presence of a single protrusion.
U.S. Pat. Nos. 6,281,514, 6,495,843, and 6,531,703 disclose methods for promoting the passage of electrons at or through a potential barrier comprising providing a potential barrier having a geometrical shape for causing quantum interference of electron de Broglie wave. Also provided is an electron-emitting surface having a series of indents, the depth of which is chosen so that the probability wave of the electron reflected from the bottom of the indent interferes destructively with the probability wave of the electron reflected from the surface. This results in the increase of tunneling through the potential barrier. A further embodiment provides a method for making an electron-emitting surface having a series of indents.
U.S. Pat. No. 6,680,214 and U.S. Patent. App. Pub. No. 2004/0206881 disclose methods for the induction of a suitable band gap and electron emissive properties into a substance, in which the substrate is provided with a surface structure corresponding to the interference of de Broglie waves.
WO99/064642 discloses a method for fabricating nanostructures directly in a material film, preferably a metal film, deposited on a substrate.
WO04/040617 discloses a method that blocks movement of low energy electrons through a thermoelectric material. This is achieved using a filter that is more transparent to high-energy electrons than to low energy ones. Tunnel barrier on the path of the electrons is used as filter. The filter works on the basis of the wave properties of the electrons. The geometry of the tunnel barrier is such that the barrier becomes transparent for electrons having certain de Broglie wavelength. If the geometry of the barrier is such that its transparency wavelength matches the wavelength of high-energy electrons it will be transparent for high-energy electrons and will be blocking low energy ones by means of tunnel barrier.
U.S. Pat. No. 7,074,498 discloses the use of electrodes having a modified shape and a method of etching a patterned indent onto the surface of a modified electrode, which increases the Fermi energy level inside the modified electrode, leading to a decrease in electron work function. The surface configuration of the modified electrode may resemble a corrugated pattern of squared-off, "u"-shaped ridges and valleys or a regular pattern of rectangular "plateaus" or "holes". The surface configuration comprises a substantially plane slab of a material having on one surface one or more indents of a depth approximately 5 to 20 times the roughness of said surface and a width approximately 5 to 15 times said depth. Typically the depth of the indents is ≧λ/2 and the width of the indents is >>λ wherein λ is the de Broglie wavelength. The thickness of the slab is typically a multiple of the depth, preferably between 5 and 15 times said depth, and in the range 15 to 75 nm.
BRIEF SUMMARY OF THE INVENTION
In accordance with the present invention there is provided a MOS transistor of special geometry, utilizing QID. The MOS transistor of the present invention comprises a semiconductor source-drain electrode with a protrusion between its source and drain regions. Contiguous with the protrusion is an insulating layer and metal gate, as in conventional MOS transistors. Provided the protrusion is of appropriate dimensions, QID occurs within the protrusion, causing the Fermi level to increase locally inside the source drain electrode. A local potential energy barrier is thus created along the path of electrons moving from the source to drain regions inside the semiconductor electrode. The size of the potential energy barrier depends on the degree of QID which depends in turn on the dimensions of the protrusion. The application of a gate voltage of appropriate size and polarity causes charge depletion in the protrusion, thereby changing the effective height of the protrusion and thus altering QID. A gate voltage regulated potential energy barrier is thus formed in the path of electrodes moving from the source to drain regions.
Objects and advantages will become apparent from the following detailed description to be read in connection with the accompanying drawings.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING
For a more complete explanation of the present invention and the technical advantages thereof, reference is now made to the following description and the accompanying drawings in which:
FIG. 1 shows a schematic of a semiconductor film with a protrusion;
FIG. 2 shows a diagrammatic representation of an electron moving inside a semiconductor film having a region of increased Fermi level due to a protrusion; and
FIG. 3 shows a schematic of a MOS transistor of the present invention.
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention and their technical advantages may be better understood by referring to FIGS. 1, 2, and 3.
Referring now to FIG. 1, which shows a semiconductor film having a protrusion. Shown is semiconductor film 10 of thickness L with single protrusion 12 of thickness a and width w formed on its surface. If the total film thickness L+a is less than the electron mean free path, then an electron inside semiconductor film 10 can be regarded as a de Broglie wave and interference effects will take place, creating a region of QID below protrusion 12.
Referring now to FIG. 2, which is a diagrammatic representation of an electron moving inside a semiconductor film having a region of increased Fermi level. Shown is electron 20 moving inside semiconductor film 10 containing region of increased Fermi level 22 beneath protrusion 12. The Fermi level and correspondingly the bottom of the conduction band are seen to increase locally whilst remaining at normal values distally. Consider electron 20 moving from source to drain electrodes (not shown) inside semiconductor film 10. Electron 20 must overcome a potential energy barrier due to increased Fermi level 22 in order to continue movement in the direction shown.
The energy required in order to overcome the potential energy barrier is given by
where E is the energy required. EF is the Fermi level of semiconductor 10, ΔEF is the potential barrier height due to increased Fermi level 22 and ε is the band gap width.
One of the ways in which electron 20 can be provided with the requisite energy E in order to cross the potential energy barrier is through the application of a voltage Vsd between source and drain regions in semiconductor 10. On the application of a sufficiently large Vsd, electron 20 is provided with enough energy to cross the potential energy barrier and a current Isd flows. The magnitude of Isd depends on ΔEF and Vsd. Thus, Isd can be expressed as
However; equation (2) can be further broken down since, as described in the prior art, ΔEF is itself a function of the dimensions of protrusion 12 on the surface of semiconductor film 10. According to a simplified theoretical model, the dependency of ΔEF on protrusions'12 dimensions is given by
where ΔEF is the potential barrier height, EF is the Fermi energy in areas remote from the protrusion, L a and w are dimensions as depicted in FIG. 1, σ is the mean free path of an electron and αn is constant. αn depends on non-regularities inside the source-drain channel and surface roughness.
Equation 3 shows a strong dependence of the potential barrier height on protrusion thickness a. A change in protrusion thickness would thus cause a change in QID and the potential barrier height, thereby regulating Isd in accordance with equation 2. This is the basis of the present invention, a possible embodiment of which is shown in FIG. 3.
Referring now to FIG. 3, which shows a schematic of a MOS transistor of the present invention. Shown is semiconductor film 30 with a single protrusion 32. A thin insulating layer 34 is disposed on the surface of protrusion 32. A thin conducting layer or gate 36 is disposed on the surface of insulating layer 34. Electrical contacts 38 connect semiconductor film 30 to gate 36 allowing gate voltage Vg to be applied therebetween.
Consider current Isd flowing through semiconductor film 30, as described in reference to FIG. 2. Vg is now applied. In a preferred embodiment of the present invention Vg is of polarity so as to create a negative charge on gate 36. Electrons in semiconductor film 30 are repelled away from gate 36 due to electrostatic repulsion. This effect is felt most strongly at the top of protrusion 32 due to its proximity to gate 36 and decreases in strength with increasing distance from gate 36. Electrons at the top of protrusion 32 are thus pushed downwards into semiconductor film 30 and a region of charge depletion is created at the top of protrusion 32. The effective height of protrusion 32 is thereby reduced, with the reduction in height equal to the height of the newly created charge depletion region.
According to the theory outlined above and expressed quantitatively in equation 3, the charge depletion region created as a result of Vg and the consequent change in height of protrusion 32 has the effect of increasing the size of ΔEF. For a given source-drain voltage, an increase in ΔEF results in a decrease in Isd since fewer electrons now have the energy E required to cross the potential energy barrier.
In summary, a gate voltage regulated potential energy barrier is formed in the path of electrons moving in semiconductor film 30, whereby the size of the current in semiconductor film 30 is modulated.
In a particularly preferred embodiment of the present invention semiconductor film 30 contains n-type source and drain regions and is manufactured with a pre-existing n-type channel present between said source and drain regions. This particularly preferred embodiment of the MOS transistor of the present invention functions in depletion mode, wherein the application of a gate voltage serves to impede current flow by way of charge depletion.
In a further preferred embodiment of the present invention insulating layer 34 comprises silicon dioxide and has a thickness of about 10 nm.
In one possible embodiment of the present invention gate 36 comprises a metal. In another possible embodiment of the present invention, gate 36 comprises polycrystalline silicon. In a particularly preferred embodiment of the present invention the depth of protrusion 32 is ≧λ/2, wherein λ is the de Broglie wavelength of an electron inside semiconductor film 30.
In another possible embodiment of the present invention semiconductor film 30 comprises an n-type semiconductor and contains p-type source and drain regions. This particular embodiment of the present invention functions in enhancement mode, wherein the application of a negative gate voltage has a dual effect. As in a conventional enhancement mode MOS transistor, the negative gate voltage repels electrons, creating a p-type channel between source and drain regions and allowing current to flow. In addition to this effect, however, a second effect unique to the present invention occurs wherein the negative gate voltage creates a region of charge depletion in protrusion 32, whereby the height of protrusion 32 and correspondingly the potential energy barrier changes. The functioning of this embodiment of the present invention is somewhat complex in that increasing the gate voltage leads to two opposing effects: the channel size increases leading to increased source-drain current and the potential energy barrier size also increases leading to a reduction in source-drain current. The balance of these two effects may allow fine-tuning of the current flow in this embodiment of the present invention.
While having described a specific preferred embodiment of the present invention with reference to the accompanied drawings, it is to be understood that the invention is not limited to that precise embodiment and that various changes and modifications may be effected therein by one skilled in the art without departing from the scope or spirit of the invention as defined in the appended claims.
Patent applications by Avto Tavkhelidze, Tbilisi GE
Patent applications in class THIN ACTIVE PHYSICAL LAYER WHICH IS (1) AN ACTIVE POTENTIAL WELL LAYER THIN ENOUGH TO ESTABLISH DISCRETE QUANTUM ENERGY LEVELS OR (2) AN ACTIVE BARRIER LAYER THIN ENOUGH TO PERMIT QUANTUM MECHANICAL TUNNELING OR (3) AN ACTIVE LAYER THIN ENOUGH TO PERMIT CARRIER TRANSMISSION WITH SUBSTANTIALLY NO SCATTERING (E.G., SUPERLATTICE QUANTUM WELL, OR BALLISTIC TRANSPORT DEVICE)
Patent applications in all subclasses THIN ACTIVE PHYSICAL LAYER WHICH IS (1) AN ACTIVE POTENTIAL WELL LAYER THIN ENOUGH TO ESTABLISH DISCRETE QUANTUM ENERGY LEVELS OR (2) AN ACTIVE BARRIER LAYER THIN ENOUGH TO PERMIT QUANTUM MECHANICAL TUNNELING OR (3) AN ACTIVE LAYER THIN ENOUGH TO PERMIT CARRIER TRANSMISSION WITH SUBSTANTIALLY NO SCATTERING (E.G., SUPERLATTICE QUANTUM WELL, OR BALLISTIC TRANSPORT DEVICE)