Low energy ion scattering (LEIS) is the study of the composition and structure of a surface by the detection of low energy ions with energies ranging from 100 eV to 10 keV elastically scattered off the surface. The extreme sensitivity to the outermost atomic layer makes it as a unique tool for surface analysis. In this paper, concepts of shadowing, blocking, and also polar and azimuthal scans have been described. Surface order and surface atom spacings are revealed by using these concepts and measuring the intensity of backscattered projectiles as a function of the incident and azimuthal angles.
Surface Review and Letters Vol. 14, Issue 1, p. 31-41