In a fraction of a second, the photovoltaic (PV) Reflectometer measures the reflectance spectrum of a wafer or cell that is dimensionally within 6 in. × 6 in. The measured reflectance plots are deconvolved to derive physical parameters including surface roughness and texture, antireflective coating thickness, metallization area and height, and backside metallization properties.
|The reflectance measurement uses a principle of reciprocity|
|A schematic of the reflectometer|
|A photograph of the reflectometer|
|Reflectometer results on three groups of commercial PV-Si wafers (4.5 in. × 4.5 in.) at different stages of solar cell processing.
antireflective (AR) coating thickness:794 to 858 Å
|Reflectance curves (in arbitrary units) of 5-in. × 5-in. wafers taken with the PV-Reflectometer. These data yield information on the surface roughness, texture height, and oxide and AR coating thicknesses.|
AR Coating thickness: ~ 600 Å
For additional information contact Dean Levi, 303-384-6605.