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Lithography - A method of producing three-dimensional relief patterns on a substrate (from the Greek lithos, meaning stone, and graphia, meaning to write).
Microlithography - Lithography involving the printing of very small features, typically on the order of micrometers or below in size.
Photolithography - Lithography involving the use of light to image and expose patterns into a photoresist (also called optical lithography).
Nanolithography - Lithography at the scale of tens of nanometers.
Litho Textbook: Fundamental Principles of Optical Lithography
Chris Mack's lithography publications
Chris Mack's lithography essays
Some good links to microlithography information:
History of Microlithography - an ongoing project
Here are links to some of my "lithography friends":