US Patent 6040937: “Interferometric modulation” – 3/21/2000Documents, Patents — By admin on October 2, 2009 at 9:29 am
The following information is excerpted from the USPTO (United States Patent and Trademak Office) document for patent number: 6,040,937
United States Patent: 6,040,937 was awarded to Miles on March 21, 2000.
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device
An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.
Inventors: Miles; Mark W. (Boston, MA)
Assignee: Etalon, Inc. (Boston, MA)
Appl. No.: 08/688,710
Filed: July 31, 1996
[Download PDF - 364 KB]: United States Patent: 6040937 – Method for fabricating a structure for a microelectromechanical systems (MEMS) device
Or you go to the USPTO web site patent number search page and enter the patent number: 6,040,937