DigiFlow Laminar Mass Flow Controller
DigiFlow Laminar Mass Flow Controller uses laminar flow element to measure and control fluid mass flow rate. The DigiFlow is many times more accurate and stable than thermal MFCs.
- High accuracy mass flow control
- High accuracy mass flow calibration
- High accuracy over wide temperature range
- Fiber Optics - glass doping
- MFC calibration
Ar, He, O2, N2, SF6, SiCl4, GeCl4, PoCl3