- Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector systemTaeho Keem
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 3, 1 1 1 Umezona, Tsukuba, Ibaraki 305 8563, Japan
Appl Opt 44:3492-8. 2005..Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 microm...