Application of MCLC Method for Estimating the Parameters of MEMS Sensors
E. Colinet, J. Juillard and L. Nicu
parameter extraction, identification, limit cycles, nonlinear systems
An original method for estimating the parameters of MEMS sensors is presented. It is based on the measurement of binary oscillations appearing at the system's output when a discrete-time relay feedback is used: the parameters of the system can then be deduced from the shape of these oscillations with a very good accuracy. This method is presented and demonstrated in the case of the identification of some cantilever micro-beams.
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Nanotech 2005 Conference Program Abstract