A metamaterial device with resonance frequency at THz was reported in this article. The device was composed of split‐ring resonators (SRR), ferroelectric Ba0.7Sr0.3TiO3
(BST70) film, and alumina substrates. The SRR of 140 nm thick Au/Ti was fabricated on BST70 film with periodicity of 50 μm, width
of 10 μm, and gap of 8 μm. The BST70 thin film was deposited on alumina substrates using a sol–gel technique. Terahertz time domain spectroscopy was used to characterize electromagnetic response of the metamaterial at various
temperatures. Finite difference time domain was used to simulate the transmission spectra of the metamaterial at THz frequencies. Dielectric constant of the BST70 film at THz, in the temperature range from 0°C to 100°C, was derived by comparing
the simulated resonance frequency with the experimental curves.