Nayak, Maheswar and Lodha, GS and Sinha, AK and Nandedkar, RV and Shivashankar, SA (2006) Determination of interlayer composition at buried interfaces using soft x-ray resonant reflectivity. In: Applied Physics Letters, 89 (18). 181920-1-3.
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The authors report determination of interlayer composition with subnanometer sensitivity at the buried interfaces using soft x-ray resonant reflectivity technique. Near the absorption edge, fine structure features of energy-dependent atomic scattering factor are sensitive to the composition, and can be exploited for determination of composition at the buried interfaces. This technique is demonstrated for a Mo–Si multilayer system using soft x-ray resonant reflectivity measurement.
|Item Type:||Journal Article|
|Additional Information:||Copyright of this article belongs to American Institute of Physics.|
|Department/Centre:||Division of Chemical Sciences > Materials Research Centre|
|Date Deposited:||08 Dec 2006|
|Last Modified:||19 Sep 2010 04:33|
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