IDEMITSU KOSAN CO., LTC.
|IDEMITSU KOSAN CO., LTC. Patent applications|
|Patent application number||Title||Published|
|20120118726||IN-GA-ZN-O TYPE SPUTTERING TARGET - A sputtering target including an oxide sintered body which includes In, Ga and Zn and includes a structure having a larger In content than that in surrounding structures and a structure having larger Ga and Zn contents than those in surrounding structures.||05-17-2012|