- Direct-drive linear motor for ultra-precise motion
- High-accuracy noncontact linear encoder
- Outstanding performance in a small footprint
The ALS135, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations.
Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS135 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup or “stiction” that is normally associated with a lead screw or ball screw drive.
The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS135 to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.
For alignment applications, outstanding step-to-step resolution is critical. The ALS135 meets this demand with a resolution of 2.5 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS135 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.
Aerotech’s ultra-stiff construction and compact two-piece design results in a stage with unmatched geometric tolerances. As a result, straightness and flatness for the standard stage is <±2 μm over the entire travel. The effects of Abbe error are nearly eliminated, vastly improving overall system accuracy.
Designed for smooth, vibration-free motion, the ALS135 exhibits the outstanding ripple-free motion required for scanning and inspection applications.
Designed for Long Life
Like all stages in the Aerotech product family, the ALS135 was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices — they not only exhibit long-life, but are completely maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.
ALS135 series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.
|Travel||25 mm||50 mm||100 mm||150 mm||200 mm|
|Drive System||Linear Brushless Servomotor (BLMUC-95-A)|
|Bus Voltage||Up to 80 VDC with a single 25-pin D connector;
Up to 160 VDC with split feedback and power – two 25-pin D connectors
|Feedback||Noncontact Linear Encoder|
|Resolution||0.0025 µm - 1.0 µm|
|Maximum Travel Speed(1)||300 mm/s|
|Maximum Linear Acceleration||1 g (No Load)|
|Maximum Load(2)||Horizontal||15.0 kg|
|Standard||±2.0µm||±2.0 µm||±4.0 µm||±6.0 µm||±8.0 µm|
|Straightness and Flatness||Maximum Deviation||±1 µm||±1.5 µm||±1.5 µm||±2 µm||±2 µm|
|Pitch||±5 arc sec||±6 arc sec||±8 arc sec||±10 arc sec||±12 arc sec|
|Roll||±5 arc sec||±6 arc sec||±8 arc sec||±10 arc sec||±12 arc sec|
|Yaw||±5 arc sec||±5 arc sec||±6 arc sec||±7 arc sec||±9 arc sec|
|Nominal Stage Weight||2.8 kg||3.0 kg||3.8 kg||4.6 kg||5.4 kg|
|Moving Mass||0.9 kg||1 kg||1.2 kg||1.4 kg||1.6 kg|
|Construction||Aluminum Body/Black Anodize Finish|
- Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
- Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
- Value with Aerotech controls and HAL option.
- Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
|Series||Travel (mm)||Limits||Linear Encoder||Ouput Cable Connectors|
ALS135 Series Linear Motor Stage
|ALS135-025||25 mm (1 in) travel stage with linear motor and limits|
|ALS135-050||50 mm (2 in) travel stage with linear motor and limits|
|ALS135-100||100 mm (4 in) travel stage with linear motor and limits|
|ALS135-150||150 mm (6 in) travel stage with linear motor and limits|
|ALS135-200||200 mm (8 in) travel stage with linear motor and limits|
|-NC||Normally-closed end of travel limit switches (standard)|
|-NO||Normally-open end of travel limit switches|
|-LTAS||Linear encoder for ALS135 with amplified sine read-head; requires external multiplier|
|-LTX5||Linear encoder for ALS135 with 1.0 µm digital TTL output|
|-LTX50||Linear encoder for ALS135 with 0.1 µm digital TTL output|
Note: Amplified sine output (LTAS) linear encoders require external multiplier. MX50 required for 0.1 micron resolution.
Accessories (to be ordered as separate line item)
|MXH5-D-mm(1)||External 20-times multiplier, 32 MHz maximum data rate, 1.0 µm (LTAS)|
|MXH10-D-mm(1)||External 40-times multiplier, 32 MHz maximum data rate, 0.5 µm (LTAS)|
|MXH25-D-mm(1)||External 100-times multiplier, 32 MHz maximum data rate, 0.2 µm (LTAS)|
|MXH50-D-mm(1)||External 200-times multiplier, 32 MHz maximum data rate, 0.1 µm (LTAS)|
|MXH100-D-mm(1)||External 400-times multiplier, 32 MHz maximum data rate, 0.05 µm (LTAS)|
|MXH200-D-mm(1)||External 800-times multiplier, 32 MHz maximum data rate, 0.025 µm (LTAS)|
|MXH250-D-mm(1)||External 1000-times multiplier, 32 MHz maximum data rate, 0.02 µm (LTAS)|
|MXH500-D-mm(1)||External 2000-times multiplier, 32 MHz maximum data rate, 0.01 µm (LTAS)|
|MXC-nn||Multiplier to controller cable; specify length '-nn' in feet|
|HALAR||High-accuracy system — linear error correction for accuracy and repeatability|
|HALSF||High-accuracy system — improved straightness and flatness|
|ALIGNMENT-NPA||Non-precision XY assembly|
|ALIGNMENT-PA10||XY assembly; 10 arc sec orthogonal|
|ALIGNMENT-PA5||XY assembly; 5 arc sec orthogonal|
- Specify data rate "mm" 2M=2 MHz, 4M=4 MHz, 8M=8 MHz, 16M=16 MHz, 32M=32 MHz.
Output Cable Connectors
|-25DU||Single 25-pin D connector (standard)|
|-4DU-25DU||4-pin HPD and 25-pin D connectors|
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V.