Alumina Slurries on the Buehler Polisher/Grinder
dgmoore at stanford.edu
Fri Mar 25 14:15:54 PDT 2011
I'd like to use the Buehler Grinder/Polisher that sits next to the wafersaw.
I'd like to use the following consumables (purchased myself) on it:
Buehler 1.0 Micron Alumina Slurry
Buehler 0.3 Micron Alumina Slurry
Buehler 0.05 Micron Alumina Slurry
Here is a link to Buehler's catalog if you're interested in looking:
I'd like to use this to polish a copper layer embedded in polyimide (HD Microsystems 2611).
More information about the specmat