ASML acquired Cymer to tie together the development teams and accelerate increases in EUV source power. Since the acquisition EUV source power has come up by 10x and six weeks before the show ASML showed 250-watts at the San Diego factory. 250-watt capability will ship out to customers later this year. For several years achieving 250-watts has been the single biggest EUV roadblock and ASML has now met this goal. Figure 1. presents the EUV throughput trend over time.