The specific technology licensed to Samsung, called scattering bar technology, is claimed to improve the imaging performance on wafers. According to ASML, this leads to improved depth of focus, enlarged process latitude, better critical dimension uniformity and higher manufacturing yields. "Scattering bar technology is fast gaining mainstream status for chip manufacturing, evidenced by the growing number of companies adopting it," said Dinesh Bettadapur, president and CEO, ASML MaskTools. Financial details of the agreement are not being disclosed.